From swkim at snf.stanford.edu Wed Apr 4 16:52:35 2007 From: swkim at snf.stanford.edu (swkim at snf.stanford.edu) Date: Wed, 4 Apr 2007 16:52:35 -0700 Subject: Problem sts SNF 2007-04-04 16:52:34: RF Power problem Message-ID: RF 1 Power Tolerance Error message popped up, and no deposition for hi freq. oxide. From jperez at snf.stanford.edu Thu Apr 5 11:15:11 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 5 Apr 2007 11:15:11 -0700 Subject: Comment sts SNF 2007-04-05 11:15:11: Down for Clean Cycle Message-ID: From jperez at snf.stanford.edu Fri Apr 6 14:55:02 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Apr 2007 14:55:02 -0700 Subject: Comment sts SNF 2007-04-05 11:15:11: Down for Clean Cycle Message-ID: Clean Completed From jperez at snf.stanford.edu Fri Apr 6 14:56:09 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Apr 2007 14:56:09 -0700 Subject: Problem sts SNF 2007-04-04 16:52:34: RF Power problem Message-ID: High frequency press resume (maybe 2/3 times) From jperez at snf.stanford.edu Fri Apr 6 14:56:45 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Apr 2007 14:56:45 -0700 Subject: Problem sts SNF 2007-04-06 14:56:44: Do NOT run Nitride recipes Message-ID: From jperez at snf.stanford.edu Tue Apr 10 15:28:57 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Apr 2007 15:28:57 -0700 Subject: Shutdown sts SNF 2007-04-10 15:28:57: Message-ID: From jperez at snf.stanford.edu Tue Apr 10 15:29:40 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Apr 2007 15:29:40 -0700 Subject: Shutdown sts SNF 2007-04-10 15:29:40: Jim Haydon is working on both RF frequencies Message-ID: From jperez at snf.stanford.edu Fri Apr 13 14:53:05 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2007 14:53:05 -0700 Subject: Shutdown sts SNF 2007-04-10 15:29:40: Jim Haydon is working on both RF frequencies Message-ID: Jim Haydon actually worked on the chamber walls, which impfroved stablization (forward power and reverse power) From jperez at snf.stanford.edu Fri Apr 13 14:53:52 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2007 14:53:52 -0700 Subject: Shutdown sts SNF 2007-04-10 15:28:57: Message-ID: From jperez at snf.stanford.edu Fri Apr 13 14:56:09 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2007 14:56:09 -0700 Subject: Problem sts SNF 2007-04-06 14:56:44: Do NOT run Nitride recipes Message-ID: Nitride process is up, Test done yesterday and today. Dep rate 66A/min - 72 A/min. From jperez at snf.stanford.edu Fri Apr 13 14:57:59 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2007 14:57:59 -0700 Subject: Comment sts SNF 2007-03-29 17:01:32: High Freqency Oxide dep rate today is 273A/min Message-ID: Ran test today and yesterday. Dep Rate on both days 311 A/min. Edit your recipe for HF oxide. From jperez at snf.stanford.edu Fri Apr 13 14:59:21 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2007 14:59:21 -0700 Subject: Problem sts SNF 2007-03-25 14:07:16: plasma striking correction Message-ID: Plasma is steady (no arcing). OK to run nitride. Parameters are stable. From jperez at snf.stanford.edu Fri Apr 13 15:00:00 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2007 15:00:00 -0700 Subject: Problem sts SNF 2007-03-25 13:57:09: plasma striking Message-ID: Plasma steady, parameters stable. From jperez at snf.stanford.edu Fri Apr 13 15:01:08 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2007 15:01:08 -0700 Subject: Problem sts SNF 2007-03-23 14:40:26: Dep rate is low for Nitride 60 A/min Message-ID: After chamber scrub, dep rate a little higher, 66 - 72 A/min From jperez at snf.stanford.edu Fri Apr 13 15:02:35 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2007 15:02:35 -0700 Subject: Problem sts SNF 2007-03-23 14:37:43: ETCHBACK3 doesn't seem to be cleaning well Message-ID: Ran two cycles of our cleaning process, yesterday and today. Parameters stable (no arcing) From jperez at snf.stanford.edu Fri Apr 13 15:05:19 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2007 15:05:19 -0700 Subject: Problem sts SNF 2007-02-05 09:21:28: Low dep rate Message-ID: Low frequency recipe has a 10% unformity problem across my test wafer. Highest thickness 910A and lowest thickness 824 A. From jperez at snf.stanford.edu Fri Apr 13 15:06:31 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2007 15:06:31 -0700 Subject: Problem sts SNF 2007-04-13 15:06:30: Low Frequency oxide range across the wfr is 10% Message-ID: Dep Rate is 206 A/min. From jperez at snf.stanford.edu Fri Apr 13 15:08:28 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2007 15:08:28 -0700 Subject: Problem sts SNF 2007-04-13 15:08:27: Venting Chamber Message-ID: Please wait a little longer for the chamber to vent or particles will rain on your wafers. It's taking about 5 minutes. From pleu at snf.stanford.edu Mon Apr 16 18:48:31 2007 From: pleu at snf.stanford.edu (pleu at snf.stanford.edu) Date: Mon, 16 Apr 2007 18:48:31 -0700 Subject: Comment sts SNF 2007-04-16 18:48:31: system clean Message-ID: The system is currently being cleaned From jperez at snf.stanford.edu Tue Apr 17 08:39:36 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 Apr 2007 08:39:36 -0700 Subject: Shutdown sts SNF 2007-04-17 08:39:35: Jim Haydon will work on STS Message-ID: He needs to shut off power to cool down chamber. We'll have to do a clean off he is done. From jperez at snf.stanford.edu Tue Apr 17 15:02:55 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 Apr 2007 15:02:55 -0700 Subject: Shutdown sts SNF 2007-04-17 08:39:35: Jim Haydon will work on STS Message-ID: Jim Haydon has rotated showerhead 90 degrees. Please test nitride recipe std_1kni and high frequency oxide using recipe std_hfox. I'll leave tests at the STS station From dgunning at snf.stanford.edu Thu Apr 19 22:23:09 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Thu, 19 Apr 2007 22:23:09 -0700 Subject: Problem sts SNF 2007-04-19 22:23:09: line purge Message-ID: during gas line purges after npredep cylce 'purge fault' message kept coming up...forced to shutdown and restart 2 times before lines fully purged. Perhaps filter needing changed. From jperez at snf.stanford.edu Fri Apr 20 10:54:03 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 20 Apr 2007 10:54:03 -0700 Subject: Problem sts SNF 2007-04-19 22:23:09: line purge Message-ID: Jim Haydon changed the gas line filter, which should eliminate the purge fault and pumpout time exceeded. The chamber will vent sooner. From jperez at snf.stanford.edu Fri Apr 20 10:54:17 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 20 Apr 2007 10:54:17 -0700 Subject: Comment sts SNF 2007-04-16 18:48:31: system clean Message-ID: clean complete From jperez at snf.stanford.edu Fri Apr 20 10:58:20 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 20 Apr 2007 10:58:20 -0700 Subject: Problem sts SNF 2007-04-13 15:08:27: Venting Chamber Message-ID: Filter for the gas line has been changed, this will vent the chamber sooner so that the lid doesn't pop up with force which releases particulates. From jperez at snf.stanford.edu Fri Apr 20 11:00:43 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 20 Apr 2007 11:00:43 -0700 Subject: Comment sts SNF 2007-04-20 11:00:43: Low Frequency still has low dep. rate and poor uniformity Message-ID: Uniformity across the wafer is greater then 10 %. From pleu at snf.stanford.edu Mon Apr 30 14:05:51 2007 From: pleu at snf.stanford.edu (pleu at snf.stanford.edu) Date: Mon, 30 Apr 2007 14:05:51 -0700 Subject: Comment sts SNF 2007-04-30 14:05:50: clean cycle Message-ID: currently under clean cycle