April 2007 Archives by thread

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Starting: Wed Apr 4 16:52:35 PDT 2007
Ending: Mon Apr 30 14:05:51 PDT 2007
Messages: 27

• Problem sts SNF 2007-04-04 16:52:34: RF Power problem   swkim at snf.stanford.edu
  • Problem sts SNF 2007-04-04 16:52:34: RF Power problem   jperez at snf.stanford.edu
• Comment sts SNF 2007-04-05 11:15:11: Down for Clean Cycle   jperez at snf.stanford.edu
  • Comment sts SNF 2007-04-05 11:15:11: Down for Clean Cycle   jperez at snf.stanford.edu
• Problem sts SNF 2007-04-06 14:56:44: Do NOT run Nitride recipes   jperez at snf.stanford.edu
  • Problem sts SNF 2007-04-06 14:56:44: Do NOT run Nitride recipes   jperez at snf.stanford.edu
• Shutdown sts SNF 2007-04-10 15:28:57:   jperez at snf.stanford.edu
  • Shutdown sts SNF 2007-04-10 15:28:57:   jperez at snf.stanford.edu
• Shutdown sts SNF 2007-04-10 15:29:40: Jim Haydon is working on both RF frequencies   jperez at snf.stanford.edu
  • Shutdown sts SNF 2007-04-10 15:29:40: Jim Haydon is working on both RF frequencies   jperez at snf.stanford.edu
• Comment sts SNF 2007-03-29 17:01:32: High Freqency Oxide dep rate today is 273A/min   jperez at snf.stanford.edu
• Problem sts SNF 2007-03-25 14:07:16: plasma striking correction   jperez at snf.stanford.edu
• Problem sts SNF 2007-03-25 13:57:09: plasma striking   jperez at snf.stanford.edu
• Problem sts SNF 2007-03-23 14:40:26: Dep rate is low for Nitride 60 A/min   jperez at snf.stanford.edu
• Problem sts SNF 2007-03-23 14:37:43: ETCHBACK3 doesn't seem to be cleaning well   jperez at snf.stanford.edu
• Problem sts SNF 2007-02-05 09:21:28: Low dep rate   jperez at snf.stanford.edu
• Problem sts SNF 2007-04-13 15:06:30: Low Frequency oxide range across the wfr is 10%   jperez at snf.stanford.edu
• Problem sts SNF 2007-04-13 15:08:27: Venting Chamber   jperez at snf.stanford.edu
  • Problem sts SNF 2007-04-13 15:08:27: Venting Chamber   jperez at snf.stanford.edu
• Comment sts SNF 2007-04-16 18:48:31: system clean   pleu at snf.stanford.edu
  • Comment sts SNF 2007-04-16 18:48:31: system clean   jperez at snf.stanford.edu
• Shutdown sts SNF 2007-04-17 08:39:35: Jim Haydon will work on STS   jperez at snf.stanford.edu
  • Shutdown sts SNF 2007-04-17 08:39:35: Jim Haydon will work on STS   jperez at snf.stanford.edu
• Problem sts SNF 2007-04-19 22:23:09: line purge   dgunning at snf.stanford.edu
  • Problem sts SNF 2007-04-19 22:23:09: line purge   jperez at snf.stanford.edu
• Comment sts SNF 2007-04-20 11:00:43: Low Frequency still has low dep. rate and poor uniformity   jperez at snf.stanford.edu
• Comment sts SNF 2007-04-30 14:05:50: clean cycle   pleu at snf.stanford.edu

Last message date: Mon Apr 30 14:05:51 PDT 2007
Archived on: Fri Jan 11 13:10:25 PST 2013

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