From jhaydon at snf.stanford.edu Thu Aug 2 08:15:42 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 2 Aug 2007 08:15:42 -0700 Subject: Shutdown sts SNF 2007-07-27 09:24:07: Investigating RF problems Message-ID: high frequencyr RFreflected power problem is fixed From jhaydon at snf.stanford.edu Thu Aug 2 08:16:47 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 2 Aug 2007 08:16:47 -0700 Subject: Problem sts SNF 2007-07-25 15:52:02: load and tune Message-ID: loose RF connection connection From tdo at snf.stanford.edu Thu Aug 2 17:09:17 2007 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Thu, 2 Aug 2007 17:09:17 -0700 Subject: Comment sts SNF 2007-08-02 17:09:16: cleaning and test completed Message-ID: I completed the cleaning cycle and deposition tests per Jeannie's instructions. Dep rates and uniformity measurements are in the binder. Nitride is 77A/min; High freq ox 320A/mins, Low freq ox 233A/mins From rohank at snf.stanford.edu Thu Aug 2 18:28:01 2007 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Thu, 2 Aug 2007 18:28:01 -0700 Subject: Comment sts SNF 2007-08-02 18:28:00: STS run for oxide Message-ID: The dep rates were back to normal (in fact they were a little higher). The load, tune and RF power also seem to have returned to normal. The temperature, however, hovers near 345 and doesnt quite reach 350C. From huangzb at snf.stanford.edu Fri Aug 3 21:16:10 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Fri, 3 Aug 2007 21:16:10 -0700 Subject: Problem sts SNF 2007-08-03 21:16:10: dark mark inside the chamber Message-ID: There is a dark mark inside the chamber. Suspected somebody may touch the stage with gloves. From jperez at snf.stanford.edu Mon Aug 6 09:09:26 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 6 Aug 2007 09:09:26 -0700 Subject: Problem sts SNF 2007-07-23 12:07:37: NO NOT USE NITride RECIPES at this time Message-ID: It seems that tests came out good after Jim Haydon work on the system. From jperez at snf.stanford.edu Mon Aug 6 15:03:53 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 6 Aug 2007 15:03:53 -0700 Subject: Problem sts SNF 2007-08-03 21:16:10: dark mark inside the chamber Message-ID: OK to use, clean cycle was done. From jperez at snf.stanford.edu Mon Aug 6 15:04:27 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 6 Aug 2007 15:04:27 -0700 Subject: Comment sts SNF 2007-08-02 18:28:00: STS run for oxide Message-ID: OK From jperez at snf.stanford.edu Mon Aug 6 15:09:05 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 6 Aug 2007 15:09:05 -0700 Subject: Problem sts SNF 2007-07-13 14:51:11: Slow dep rate for nitride. Message-ID: After repairs Nitride test today was 80A /min. 5% uniformity across the wafer. From huangzb at snf.stanford.edu Wed Aug 8 15:41:13 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Wed, 8 Aug 2007 15:41:13 -0700 Subject: Comment sts SNF 2007-08-08 15:41:13: cleaning cycle Message-ID: From jperez at snf.stanford.edu Thu Aug 9 08:36:24 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 9 Aug 2007 08:36:24 -0700 Subject: Comment sts SNF 2007-08-08 15:41:13: cleaning cycle Message-ID: Completed Cleaning cycle. From jperez at snf.stanford.edu Thu Aug 9 08:43:44 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 9 Aug 2007 08:43:44 -0700 Subject: Problem sts SNF 2007-05-25 14:10:20: Low Frequency oxide still has a uniformity problem Message-ID: After repairs on STS the uniformity using low frequency oxide has improved, but still uniformity across the wafer is 7%. From krivoire at snf.stanford.edu Fri Aug 10 02:29:39 2007 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Fri, 10 Aug 2007 02:29:39 -0700 Subject: Comment sts SNF 2007-08-10 02:29:39: platen Message-ID: After running nitride predep, sleeve touched platen and left mark. Cooled platen, cleaned, and ran o2 descum. Subsequent depositions were fine. Also ran o2 descum at end of depositions. From fmadriz at snf.stanford.edu Fri Aug 10 18:15:51 2007 From: fmadriz at snf.stanford.edu (fmadriz at snf.stanford.edu) Date: Fri, 10 Aug 2007 18:15:51 -0700 Subject: Problem sts SNF 2007-08-10 18:15:51: STS will not pump down to 15mTorr Message-ID: Could not initiate the deposition. STS will take hours to pump down. From huangzb at snf.stanford.edu Sat Aug 11 12:45:01 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sat, 11 Aug 2007 12:45:01 -0700 Subject: Problem sts SNF 2007-08-11 12:45:00: chamber cannot pump down to 15mTorr Message-ID: Always around 22 to 28. From jperez at snf.stanford.edu Mon Aug 13 07:23:30 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 13 Aug 2007 07:23:30 -0700 Subject: Comment sts SNF 2007-08-10 02:29:39: platen Message-ID: STS received clean cycle and platen OK. From jperez at snf.stanford.edu Mon Aug 13 08:27:45 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 13 Aug 2007 08:27:45 -0700 Subject: Problem sts SNF 2007-08-11 12:45:00: chamber cannot pump down to 15mTorr Message-ID: Chamber pumped down to 8 mTorr, but wouldn't show the 4Fs. Rebooted the computer and started etchbake 3 recipe. OK From jperez at snf.stanford.edu Mon Aug 13 08:29:08 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 13 Aug 2007 08:29:08 -0700 Subject: Problem sts SNF 2007-08-10 18:15:51: STS will not pump down to 15mTorr Message-ID: I only had a problem getting the four Fs to show on the panel. Rebooted the computer and system is running etchbak3 From rissman at snf.stanford.edu Tue Aug 14 09:20:42 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 14 Aug 2007 09:20:42 -0700 Subject: Problem sts SNF 2006-12-04 09:28:09: Low Frequency process has poor unformity Message-ID: Low frequency uniformity has improved to 7% due to matching network repair. From dkozak at snf.stanford.edu Wed Aug 15 21:37:40 2007 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Wed, 15 Aug 2007 21:37:40 -0700 Subject: Problem sts SNF 2007-08-15 21:37:39: Gas flow error Message-ID: Machine was in cleaning cycle, doing Wall Clean 2. Message appears "Gas flow error -- FREON-14", which put machine in hold. After trying to "resume" (F2 button), comes back with same message. From mdickey at snf.stanford.edu Thu Aug 16 07:14:51 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Aug 2007 07:14:51 -0700 Subject: Problem sts SNF 2007-08-15 21:37:39: Gas flow error Message-ID: Had to adjust the regulator after the bottle change From jperez at snf.stanford.edu Thu Aug 16 15:27:12 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 16 Aug 2007 15:27:12 -0700 Subject: Comment sts SNF 2007-08-02 17:09:16: cleaning and test completed Message-ID: OK to run high frequency, low frequency oxide and nitride.