Comment sts SNF 2007-08-02 17:09:16: cleaning and test completed

tdo at snf.stanford.edu tdo at snf.stanford.edu
Thu Aug 2 17:09:17 PDT 2007


I completed the cleaning cycle and deposition tests per Jeannie's instructions.  Dep rates and uniformity measurements are in the binder.  Nitride is 77A/min; High freq ox 320A/mins, Low freq ox 233A/mins




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