Comment sts SNF 2007-08-08 15:41:13: cleaning cycle
huangzb at snf.stanford.edu
huangzb at snf.stanford.edu
Wed Aug 8 15:41:13 PDT 2007
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Problem sts SNF 2007-07-13 14:51:11: Slow dep rate for nitride.
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Comment sts SNF 2007-08-08 15:41:13: cleaning cycle
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Problem sts SNF 2007-07-13 14:51:11: Slow dep rate for nitride.
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Comment sts SNF 2007-08-08 15:41:13: cleaning cycle
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