Comment sts SNF 2007-08-08 15:41:13: cleaning cycle
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Thu Aug 9 08:36:24 PDT 2007
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Comment sts SNF 2007-08-08 15:41:13: cleaning cycle
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Problem sts SNF 2007-05-25 14:10:20: Low Frequency oxide still has a uniformity problem
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Completed Cleaning cycle.
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Comment sts SNF 2007-08-08 15:41:13: cleaning cycle
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Problem sts SNF 2007-05-25 14:10:20: Low Frequency oxide still has a uniformity problem
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