Problem sts SNF 2007-05-25 14:10:20: Low Frequency oxide still has a uniformity problem

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Aug 9 08:43:44 PDT 2007

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After repairs on STS the uniformity using low frequency oxide
has improved, but still uniformity across the wafer is 7%.

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