Comment sts SNF 2007-08-10 02:29:39: platen

krivoire at snf.stanford.edu krivoire at snf.stanford.edu
Fri Aug 10 02:29:39 PDT 2007

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After running nitride predep, sleeve touched platen and left mark. Cooled platen, cleaned, and ran o2 descum. Subsequent depositions were fine. Also ran o2 descum at end of depositions.

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