Comment sts SNF 2007-08-10 02:29:39: platen

krivoire at snf.stanford.edu krivoire at snf.stanford.edu
Fri Aug 10 02:29:39 PDT 2007


After running nitride predep, sleeve touched platen and left mark. Cooled platen, cleaned, and ran o2 descum. Subsequent depositions were fine. Also ran o2 descum at end of depositions.




More information about the sts-pcs mailing list