Problem sts SNF 2007-08-10 18:15:51: STS will not pump down to 15mTorr

fmadriz at snf.stanford.edu fmadriz at snf.stanford.edu
Fri Aug 10 18:15:51 PDT 2007

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Could not initiate the deposition. STS will take hours to pump down.

Previous message: Comment sts SNF 2007-08-10 02:29:39: platen
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