Problem sts SNF 2007-08-11 12:45:00: chamber cannot pump down to 15mTorr
huangzb at snf.stanford.edu
huangzb at snf.stanford.edu
Sat Aug 11 12:45:01 PDT 2007
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Problem sts SNF 2007-08-10 18:15:51: STS will not pump down to 15mTorr
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Problem sts SNF 2007-08-11 12:45:00: chamber cannot pump down to 15mTorr
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Always around 22 to 28.
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Problem sts SNF 2007-08-10 18:15:51: STS will not pump down to 15mTorr
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Problem sts SNF 2007-08-11 12:45:00: chamber cannot pump down to 15mTorr
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