Comment sts SNF 2007-08-10 02:29:39: platen
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Mon Aug 13 07:23:30 PDT 2007
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Comment sts SNF 2007-08-10 02:29:39: platen
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Problem sts SNF 2007-08-10 18:15:51: STS will not pump down to 15mTorr
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STS received clean cycle and platen OK.
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Comment sts SNF 2007-08-10 02:29:39: platen
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Problem sts SNF 2007-08-10 18:15:51: STS will not pump down to 15mTorr
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