Problem sts SNF 2007-08-11 12:45:00: chamber cannot pump down to 15mTorr

jperez at snf.stanford.edu jperez at snf.stanford.edu
Mon Aug 13 08:27:45 PDT 2007


Chamber pumped down to 8 mTorr, but wouldn't show the 
4Fs. Rebooted the computer and started etchbake 3 recipe.
OK




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