Problem sts SNF 2007-08-10 18:15:51: STS will not pump down to 15mTorr

jperez at snf.stanford.edu jperez at snf.stanford.edu
Mon Aug 13 08:29:08 PDT 2007


I only had a problem getting the four Fs to show on the panel.
Rebooted the computer and system is running etchbak3




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