August 2007 Archives by thread

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Starting: Thu Aug 2 08:15:42 PDT 2007
Ending: Thu Aug 16 15:27:12 PDT 2007
Messages: 22

• Shutdown sts SNF 2007-07-27 09:24:07: Investigating RF problems   jhaydon at snf.stanford.edu
• Problem sts SNF 2007-07-25 15:52:02: load and tune   jhaydon at snf.stanford.edu
• Comment sts SNF 2007-08-02 17:09:16: cleaning and test completed   tdo at snf.stanford.edu
  • Comment sts SNF 2007-08-02 17:09:16: cleaning and test completed   jperez at snf.stanford.edu
• Comment sts SNF 2007-08-02 18:28:00: STS run for oxide   rohank at snf.stanford.edu
  • Comment sts SNF 2007-08-02 18:28:00: STS run for oxide   jperez at snf.stanford.edu
• Problem sts SNF 2007-08-03 21:16:10: dark mark inside the chamber   huangzb at snf.stanford.edu
  • Problem sts SNF 2007-08-03 21:16:10: dark mark inside the chamber   jperez at snf.stanford.edu
• Problem sts SNF 2007-07-23 12:07:37: NO NOT USE NITride RECIPES at this time   jperez at snf.stanford.edu
• Problem sts SNF 2007-07-13 14:51:11: Slow dep rate for nitride.   jperez at snf.stanford.edu
• Comment sts SNF 2007-08-08 15:41:13: cleaning cycle   huangzb at snf.stanford.edu
  • Comment sts SNF 2007-08-08 15:41:13: cleaning cycle   jperez at snf.stanford.edu
• Problem sts SNF 2007-05-25 14:10:20: Low Frequency oxide still has a uniformity problem   jperez at snf.stanford.edu
• Comment sts SNF 2007-08-10 02:29:39: platen   krivoire at snf.stanford.edu
  • Comment sts SNF 2007-08-10 02:29:39: platen   jperez at snf.stanford.edu
• Problem sts SNF 2007-08-10 18:15:51: STS will not pump down to 15mTorr   fmadriz at snf.stanford.edu
  • Problem sts SNF 2007-08-10 18:15:51: STS will not pump down to 15mTorr   jperez at snf.stanford.edu
• Problem sts SNF 2007-08-11 12:45:00: chamber cannot pump down to 15mTorr   huangzb at snf.stanford.edu
  • Problem sts SNF 2007-08-11 12:45:00: chamber cannot pump down to 15mTorr   jperez at snf.stanford.edu
• Problem sts SNF 2006-12-04 09:28:09: Low Frequency process has poor unformity   rissman at snf.stanford.edu
• Problem sts SNF 2007-08-15 21:37:39: Gas flow error   dkozak at snf.stanford.edu
  • Problem sts SNF 2007-08-15 21:37:39: Gas flow error   mdickey at snf.stanford.edu

Last message date: Thu Aug 16 15:27:12 PDT 2007
Archived on: Fri Jan 11 13:10:26 PST 2013

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