From jonroth at snf.stanford.edu Thu Feb 1 01:22:56 2007 From: jonroth at snf.stanford.edu (jonroth at snf.stanford.edu) Date: Thu, 1 Feb 2007 01:22:56 -0800 Subject: Comment sts SNF 2007-02-01 01:22:55: Clean Cycle Message-ID: Machine is in clean - I won't be in the fab on thursday to continue it - someone please pick it up. From mtang at snf.stanford.edu Thu Feb 1 09:26:29 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 1 Feb 2007 09:26:29 -0800 Subject: Problem sts SNF 2007-02-01 09:26:26: Low dep rates? Message-ID: Rumors of low dep rate -- will be checking with other users. Please let us know your results (Jeannie is out until Monday). From rcordova at snf.stanford.edu Mon Feb 5 09:06:02 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Mon, 5 Feb 2007 09:06:02 -0800 Subject: Comment sts SNF 2007-02-05 09:06:01: Low dep rate confirmed on my oxide test Message-ID: KOSO3000 Recipe usually gets thickness of 2700a at 8 min. deposition, now running at apprx 2450a. Made a note in logbook and notified Jeannie. From mtang at snf.stanford.edu Mon Feb 5 09:21:28 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 5 Feb 2007 09:21:28 -0800 Subject: Problem sts SNF 2007-02-05 09:21:28: Low dep rate Message-ID: Confirmed. Staff is looking into this. From mtang at snf.stanford.edu Mon Feb 5 09:21:58 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 5 Feb 2007 09:21:58 -0800 Subject: Problem sts SNF 2007-02-01 09:26:26: Low dep rates? Message-ID: Low dep rate confirmed. Staff is looking into this. From jonroth at snf.stanford.edu Thu Feb 8 09:35:35 2007 From: jonroth at snf.stanford.edu (jonroth at snf.stanford.edu) Date: Thu, 8 Feb 2007 09:35:35 -0800 Subject: Shutdown sts SNF 2007-02-08 09:35:34: computer failure Message-ID: Upon Reboot, "Primary master hard disk fail" From jhaydon at snf.stanford.edu Fri Feb 9 08:53:55 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 9 Feb 2007 08:53:55 -0800 Subject: Shutdown sts SNF 2007-02-08 09:35:34: computer failure Message-ID: computer working now but could still ail i am looking for repacement hard drive for backup From emyers at snf.stanford.edu Wed Feb 14 10:48:41 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 14 Feb 2007 10:48:41 -0800 Subject: Comment sts SNF 2007-02-14 10:48:41: Switched to Silane B Side Message-ID: I toggled the silane source over to the B side. From seoung at snf.stanford.edu Tue Feb 20 21:08:20 2007 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Tue, 20 Feb 2007 21:08:20 -0800 Subject: Problem sts SNF 2007-02-20 21:08:19: Hard disk error Message-ID: When I started venting, an error occured. It said hard disk can not be read. I restarted the computer but it was not recovered. From jperez at snf.stanford.edu Thu Feb 22 06:38:45 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 Feb 2007 06:38:45 -0800 Subject: Comment sts SNF 2007-02-14 10:48:41: Switched to Silane B Side Message-ID: Tested new bottle switch and high frequency dep. rate was still low 289A / min. From rissman at snf.stanford.edu Sat Feb 24 09:10:09 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Sat, 24 Feb 2007 09:10:09 -0800 Subject: Shutdown sts SNF 2007-02-24 09:10:08: computer issues Message-ID: Eric P. built a new hard disk for the system. However, it appears to not communicate with the hardware. Could be an rs232 cable problem. From shott at snf.stanford.edu Sat Feb 24 10:10:13 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 24 Feb 2007 10:10:13 -0800 Subject: Shutdown sts SNF 2007-02-24 09:10:08: computer issues Message-ID: I've cleared this shutdown after speaking with chen0622. He has been able to clear the problem by re-booting the computer and had sucessfully done this with Jeannie yesterday. John From chen0622 at snf.stanford.edu Sat Feb 24 10:38:20 2007 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Sat, 24 Feb 2007 10:38:20 -0800 Subject: Problem sts SNF 2007-02-24 10:38:20: could not vent the chamber Message-ID: reboot the PC successfully . But during the venting sequence, did not hear the operation of pneumatic valve. The substrate stage was not in the right temperature (350C) either. From chen0622 at snf.stanford.edu Sat Feb 24 10:38:52 2007 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Sat, 24 Feb 2007 10:38:52 -0800 Subject: Shutdown sts SNF 2007-02-24 10:38:52: same reason as above Message-ID: From jperez at snf.stanford.edu Mon Feb 26 09:38:21 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 26 Feb 2007 09:38:21 -0800 Subject: Comment sts SNF 2007-02-01 01:22:55: Clean Cycle Message-ID: complete From jhaydon at snf.stanford.edu Mon Feb 26 16:14:30 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 26 Feb 2007 16:14:30 -0800 Subject: Shutdown sts SNF 2007-02-24 10:38:52: same reason as above Message-ID: working now wrong serial port connected From ericp at snf.stanford.edu Mon Feb 26 23:10:39 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 26 Feb 2007 23:10:39 -0800 Subject: Comment sts SNF 2007-02-26 23:10:39: System ok now, Started etchback Message-ID: Once the cleaning cycle is complete, system should be ok to use. All of the recipes (that were still alive on Friday) have been copied to the new computer. From jperez at snf.stanford.edu Tue Feb 27 15:23:17 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 27 Feb 2007 15:23:17 -0800 Subject: Comment sts SNF 2007-02-26 23:10:39: System ok now, Started etchback Message-ID: Clean cycle is complete! Good news/bad news. Good news after a 12 min deposition; T=3308, C=3315, F=3316, L=3312 R=3323 Avg. 3315 delta=15 A. Very good uniformity. That was the good news.The bad news is the dep. rate is still dropping. Today is was 276A/min. On the 16th of this month is was 286A/min. On the 9th of Feb it was 307A/ min. From jperez at snf.stanford.edu Tue Feb 27 15:24:52 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 27 Feb 2007 15:24:52 -0800 Subject: Problem sts SNF 2007-02-24 10:38:20: could not vent the chamber Message-ID: Not pausing long enough between F3 (vent) and F1 (open valve).. From jperez at snf.stanford.edu Tue Feb 27 15:25:31 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 27 Feb 2007 15:25:31 -0800 Subject: Problem sts SNF 2007-02-20 21:08:19: Hard disk error Message-ID: The Hard drive has been changed. From jperez at snf.stanford.edu Tue Feb 27 15:25:57 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 27 Feb 2007 15:25:57 -0800 Subject: Comment sts SNF 2007-02-05 09:06:01: Low dep rate confirmed on my oxide test Message-ID: dep. rate still dropping. From jperez at snf.stanford.edu Tue Feb 27 15:32:23 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 27 Feb 2007 15:32:23 -0800 Subject: Problem sts SNF 2007-02-27 15:32:23: Ran a total of five test this month and dep. rate is still dropping Message-ID: Feb.05, 3 min HF deposition -291A/min Feb 09, 12min HFdeposition- 307A/min Feb 12, 12 min HF deposition- 305A/min Feb 16, 12 min HF deposition - 286A/min Feb 27, 12min HF deposition - 276A/min, Uniformity is very good. From jperez at snf.stanford.edu Tue Feb 27 16:23:57 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 27 Feb 2007 16:23:57 -0800 Subject: Problem sts SNF 2007-02-27 16:23:57: The Ar (black pump key) isn't working. Message-ID: To shut off the Ar flow this black toggle isn't shutting off the argon. The flow controller is in the back. You'll have to drop the flow to zero for now by turning the knob on the flow controller. When putting the STS in standby, set the flow to 8. This is in the back. (NOT THE ONE IN FRONT). Jim will work on it tomorrow. From pleu at snf.stanford.edu Tue Feb 27 17:25:25 2007 From: pleu at snf.stanford.edu (pleu at snf.stanford.edu) Date: Tue, 27 Feb 2007 17:25:25 -0800 Subject: Comment sts SNF 2007-02-27 17:25:25: system clean Message-ID: The system is currently being cleaned. Please continue the process to finish off. From jhaydon at snf.stanford.edu Wed Feb 28 16:02:02 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 28 Feb 2007 16:02:02 -0800 Subject: Problem sts SNF 2007-02-27 16:23:57: The Ar (black pump key) isn't working. Message-ID: key is working the problem is innthe programs From jonroth at snf.stanford.edu Wed Feb 28 19:23:02 2007 From: jonroth at snf.stanford.edu (jonroth at snf.stanford.edu) Date: Wed, 28 Feb 2007 19:23:02 -0800 Subject: Problem sts SNF 2007-02-28 19:23:01: Nitride recipes generate error Message-ID: Myself and previous user had problem. Nitride recipe generates pressure tolerance error, reads 8millitorr. I tried oxide then, it is executing, reads 646 millitorr.