From jperez at snf.stanford.edu Wed Jan 3 15:00:58 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 3 Jan 2007 15:00:58 -0800 Subject: Comment sts SNF 2007-01-03 15:00:57: Uniformity much better! Message-ID: Jim Haydon made some adjustments on the shower head during the shutdown and I got much better uniformity on my tests wafers on nitride and high frequency oxide. See logbook for test results. From rcordova at snf.stanford.edu Mon Jan 15 12:29:34 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Mon, 15 Jan 2007 12:29:34 -0800 Subject: Comment sts SNF 2007-01-15 12:29:33: Programs missing... Message-ID: All of our oxide programs were missing. Had to recreate them. also, no gases were flowing for the o2descum program. Please check it out. Thanks Rosie From jperez at snf.stanford.edu Thu Jan 18 12:00:32 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 18 Jan 2007 12:00:32 -0800 Subject: Shutdown sts SNF 2007-01-18 12:00:32: Gas Bottle change. Message-ID: Toggle switched from B to A position From jperez at snf.stanford.edu Thu Jan 18 14:25:31 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 18 Jan 2007 14:25:31 -0800 Subject: Shutdown sts SNF 2007-01-18 12:00:32: Gas Bottle change. Message-ID: Switched all three toggles to A position. OK to use From jperez at snf.stanford.edu Fri Jan 19 14:31:20 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Jan 2007 14:31:20 -0800 Subject: Problem sts SNF 2007-01-19 14:31:20: All recipes that were ran, Message-ID: "Pressure tolerance error" in 16 hour warmdown. For this weekend please do not depend on the 16 hour N2 purge. Abort and leave it a standby mode. Thanks From jperez at snf.stanford.edu Tue Jan 23 07:14:31 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 23 Jan 2007 07:14:31 -0800 Subject: Problem sts SNF 2007-01-19 14:31:20: All recipes that were ran, Message-ID: "Pressure Tolerance Error" has been fixed. Jim adjusted PSI to 12 and set N2 flow at 1.2 From jperez at snf.stanford.edu Tue Jan 23 07:16:14 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 23 Jan 2007 07:16:14 -0800 Subject: Comment sts SNF 2007-01-15 12:29:33: Programs missing... Message-ID: Only Rosie's recipes seem to be missing. Have no idea how this happened. From jperez at snf.stanford.edu Tue Jan 23 07:20:50 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 23 Jan 2007 07:20:50 -0800 Subject: Comment sts SNF 2007-01-03 15:00:57: Uniformity much better! Message-ID: Nitride and high frequency oxide uniformity are less than <2% across the wafers. Low frequency oxide is >10%