From mdickey at snf.stanford.edu Tue Jul 3 07:39:07 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 3 Jul 2007 07:39:07 -0700 Subject: Shutdown sts SNF 2007-07-03 07:39:07: Burnbox Message-ID: No water or air flow to burnbox at the moment From mtang at snf.stanford.edu Fri Jul 6 09:20:05 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 6 Jul 2007 09:20:05 -0700 Subject: Comment sts SNF 2007-07-06 09:20:01: Update Message-ID: Burnbox repair is in progress. Estimate is that it will be done Tuesday. From jperez at snf.stanford.edu Mon Jul 9 14:29:43 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Jul 2007 14:29:43 -0700 Subject: Comment sts SNF 2007-07-06 09:20:01: Update Message-ID: Starting clean cycle, per Jim H. burnbox is up From jperez at snf.stanford.edu Mon Jul 9 14:31:29 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Jul 2007 14:31:29 -0700 Subject: Shutdown sts SNF 2007-07-03 07:39:07: Burnbox Message-ID: Burnbox has been repaired per Jim Haydon. Ready for Clean cycle. From jperez at snf.stanford.edu Mon Jul 9 14:33:32 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Jul 2007 14:33:32 -0700 Subject: Comment sts SNF 2007-07-09 14:33:31: Due to temperature turn off, system needs Cleanning. Message-ID: Gas bottle change from B toggles to A toggles. Will need to be tested. Jim sanded platen. From jperez at snf.stanford.edu Mon Jul 9 14:52:33 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 Jul 2007 14:52:33 -0700 Subject: Shutdown sts SNF 2007-07-09 14:52:32: Gas Box not installed correctly after Methane capped off. Message-ID: From jperez at snf.stanford.edu Tue Jul 10 10:49:10 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Jul 2007 10:49:10 -0700 Subject: Shutdown sts SNF 2007-07-09 14:52:32: Gas Box not installed correctly after Methane capped off. Message-ID: Maintenance OK'd exhaust lines hooked up correctly. From jperez at snf.stanford.edu Tue Jul 10 15:00:48 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Jul 2007 15:00:48 -0700 Subject: Comment sts SNF 2007-07-09 14:33:31: Due to temperature turn off, system needs Cleanning. Message-ID: clean cycle complete. Will need tests per information attached to equipment. Run recipe std_1kni, approx. 1000A, Run recipe std_lfox, approx 1000A. Run recipe std_hfox, approx. 3150A. From jperez at snf.stanford.edu Tue Jul 10 15:01:33 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Jul 2007 15:01:33 -0700 Subject: Shutdown sts SNF 2007-07-10 15:01:33: Ready for Tests, see attached instructions with test wafers Message-ID: From jperez at snf.stanford.edu Tue Jul 10 15:05:37 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Jul 2007 15:05:37 -0700 Subject: Shutdown sts SNF 2007-07-10 15:01:33: Ready for Tests, see attached instructions with test wafers Message-ID: for some reason Type is shutdown, but didn't put STS down. Should be under (Type) comment. From jperez at snf.stanford.edu Tue Jul 10 15:07:32 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 10 Jul 2007 15:07:32 -0700 Subject: Comment sts SNF 2007-07-10 15:07:32: Ready for Qual tests. Message-ID: Test Wafers and instructions are attached to STS for qualification. From jperez at snf.stanford.edu Thu Jul 12 09:43:48 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 12 Jul 2007 09:43:48 -0700 Subject: Comment sts SNF 2007-07-12 09:43:47: STS going down for a clean! Message-ID: From jperez at snf.stanford.edu Fri Jul 13 14:51:11 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Jul 2007 14:51:11 -0700 Subject: Problem sts SNF 2007-07-13 14:51:11: Slow dep rate for nitride. Message-ID: If someone is running nitride, I have bare silicon Test Wfrs on top of the MFC cover. It was only 49 angstroms a minute. From fmadriz at snf.stanford.edu Sun Jul 15 13:20:52 2007 From: fmadriz at snf.stanford.edu (fmadriz at snf.stanford.edu) Date: Sun, 15 Jul 2007 13:20:52 -0700 Subject: Comment sts SNF 2007-07-15 13:20:51: white cloud around the edge of the wafers Message-ID: After depositing Ti/Au in metallica, STS was used to dep oxide. At the end there was a white cloud sourronding the edge of the wafers. It was not present after metallica. From jperez at snf.stanford.edu Mon Jul 16 13:50:35 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 16 Jul 2007 13:50:35 -0700 Subject: Comment sts SNF 2007-07-15 13:20:51: white cloud around the edge of the wafers Message-ID: I ran a high frequency test 3000 A, no white ring around my wafer. From mdickey at snf.stanford.edu Tue Jul 17 06:02:55 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 17 Jul 2007 06:02:55 -0700 Subject: Shutdown sts SNF 2007-07-17 06:02:55: cooling water Message-ID: Down for cooling water From mdickey at snf.stanford.edu Tue Jul 17 06:18:18 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 17 Jul 2007 06:18:18 -0700 Subject: Shutdown sts SNF 2007-07-17 06:02:55: cooling water Message-ID: canceled From jperez at snf.stanford.edu Thu Jul 19 07:20:45 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 19 Jul 2007 07:20:45 -0700 Subject: Comment sts SNF 2007-07-12 09:43:47: STS going down for a clean! Message-ID: completed From jperez at snf.stanford.edu Thu Jul 19 07:21:11 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 19 Jul 2007 07:21:11 -0700 Subject: Comment sts SNF 2007-07-10 15:07:32: Ready for Qual tests. Message-ID: Tests done. From ehe at snf.stanford.edu Fri Jul 20 16:51:37 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 20 Jul 2007 16:51:37 -0700 Subject: Comment sts SNF 2007-07-20 16:51:36: STS cleaning Message-ID: Previous user ID=shanewang started cleaning cycle with the etchbak3 program. I continued and finished the cleaning cycle. From rshyam at snf.stanford.edu Sat Jul 21 05:19:12 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 21 Jul 2007 05:19:12 -0700 Subject: Comment sts SNF 2007-07-21 05:19:11: reflected power high Message-ID: The reflected power was very high for the high frequency plasma in nitride recipe. From libei at snf.stanford.edu Sat Jul 21 07:36:08 2007 From: libei at snf.stanford.edu (libei at snf.stanford.edu) Date: Sat, 21 Jul 2007 07:36:08 -0700 Subject: Problem sts SNF 2007-07-21 07:36:08: reflected power too high Message-ID: fwd/ref power was read as 37/32 when I did high frequency oxide deposition. From ehe at snf.stanford.edu Sun Jul 22 08:19:15 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 22 Jul 2007 08:19:15 -0700 Subject: Comment sts SNF 2007-07-22 08:19:14: reminder about the argon gas Message-ID: There were a couple spots of some clear-colored residue on the STS platform this morning and the argon gas was not running. If you notice stuff on the platform after you use it please comment on what it might be next time so the next user can judge if it's worth contaminating their chip. And remember to toggle the argon back on after use... thanks. From jperez at snf.stanford.edu Mon Jul 23 12:04:27 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Jul 2007 12:04:27 -0700 Subject: Comment sts SNF 2007-07-22 08:19:14: reminder about the argon gas Message-ID: Thanks, From jperez at snf.stanford.edu Mon Jul 23 12:05:19 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Jul 2007 12:05:19 -0700 Subject: Comment sts SNF 2007-07-21 05:19:11: reflected power high Message-ID: DO NOT USE Nitride recipes at this time From jperez at snf.stanford.edu Mon Jul 23 12:05:33 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Jul 2007 12:05:33 -0700 Subject: Comment sts SNF 2007-07-20 16:51:36: STS cleaning Message-ID: complete From jperez at snf.stanford.edu Mon Jul 23 12:06:16 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Jul 2007 12:06:16 -0700 Subject: Problem sts SNF 2007-07-21 07:36:08: reflected power too high Message-ID: Do not use Nitride recipes at this time, until we find the problem From jperez at snf.stanford.edu Mon Jul 23 12:07:38 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Jul 2007 12:07:38 -0700 Subject: Problem sts SNF 2007-07-23 12:07:37: NO NOT USE NITride RECIPES at this time Message-ID: From rohank at snf.stanford.edu Wed Jul 25 15:52:02 2007 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Wed, 25 Jul 2007 15:52:02 -0700 Subject: Problem sts SNF 2007-07-25 15:52:02: load and tune Message-ID: Ran high frequency oxide today. The load and tune are way off from their nominal values. This is resulting in variable deposition rates. From mtang at snf.stanford.edu Fri Jul 27 09:24:08 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 27 Jul 2007 09:24:08 -0700 Subject: Shutdown sts SNF 2007-07-27 09:24:07: Investigating RF problems Message-ID: