From jperez at snf.stanford.edu Tue Jun 5 14:04:04 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jun 2007 14:04:04 -0700 Subject: Problem sts SNF 2007-06-05 14:04:04: black toggle broke of valve for manual argon purge Message-ID: From jperez at snf.stanford.edu Tue Jun 5 15:06:53 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jun 2007 15:06:53 -0700 Subject: Problem sts SNF 2007-06-05 14:04:04: black toggle broke of valve for manual argon purge Message-ID: Only for tonight, use 16 hour warmdown. From jperez at snf.stanford.edu Tue Jun 5 15:12:48 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jun 2007 15:12:48 -0700 Subject: Problem sts SNF 2007-06-05 15:12:47: Black toggle broke off, Message-ID: 1)Run your samples, when finished 2) select recipe o2descum and process (F1), the N2 flow will run for 16 hours. 3) If new user, abort 16 hour warndown 4) repeat step 1 above (Run samples), start 02descum recipe when done. sorry for the inconvenience. Jim will fit it in the morning. From jhaydon at snf.stanford.edu Wed Jun 6 08:12:42 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 6 Jun 2007 08:12:42 -0700 Subject: Problem sts SNF 2007-06-05 15:12:47: Black toggle broke off, Message-ID: toggle switch replaced From rohank at snf.stanford.edu Sat Jun 23 14:49:22 2007 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Sat, 23 Jun 2007 14:49:22 -0700 Subject: Problem sts SNF 2007-06-23 14:49:22: Lid does not open up after venting the chamber Message-ID: The lid stays closed even 10 minutes after venting the chamber (and pressing F1 - Open lid). I got around this by pressing F1-Close lid (on an already closed lid) and then venting the chamber again. This happened twice. From dkozak at snf.stanford.edu Tue Jun 26 21:14:40 2007 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Tue, 26 Jun 2007 21:14:40 -0700 Subject: Shutdown sts SNF 2007-06-26 21:14:39: sts lid won't close Message-ID: sts lid won't close after venting. After twice loading and unloading wafers, lid got stuck open. Message on screen: "please close chamber lid". Pushing blue buttons doesn't work. Program is not responsive to anything. Pushed button "plant off" to turn off heater. From dkozak at snf.stanford.edu Tue Jun 26 21:30:05 2007 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Tue, 26 Jun 2007 21:30:05 -0700 Subject: Comment sts SNF 2007-06-26 21:30:05: got lid closed Message-ID: After re-booting the computer, was able to close the lid. Pushed "plant on" button, system is warming up. From jperez at snf.stanford.edu Wed Jun 27 08:55:15 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 27 Jun 2007 08:55:15 -0700 Subject: Comment sts SNF 2007-06-26 21:30:05: got lid closed Message-ID: Temperature at 350, ready to use. From jperez at snf.stanford.edu Wed Jun 27 08:56:17 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 27 Jun 2007 08:56:17 -0700 Subject: Shutdown sts SNF 2007-06-26 21:14:39: sts lid won't close Message-ID: dkozak, rebooted the system after turning hardware off / on. From jperez at snf.stanford.edu Wed Jun 27 08:57:45 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 27 Jun 2007 08:57:45 -0700 Subject: Problem sts SNF 2007-06-23 14:49:22: Lid does not open up after venting the chamber Message-ID: Believe user didn't pause long enough between F3 and F1. From jhaydon at snf.stanford.edu Thu Jun 28 13:59:21 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 28 Jun 2007 13:59:21 -0700 Subject: Shutdown sts SNF 2007-06-28 13:59:20: shut down for work on platen Message-ID: From jperez at snf.stanford.edu Fri Jun 29 11:14:48 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 29 Jun 2007 11:14:48 -0700 Subject: Problem sts SNF 2007-06-29 11:14:48: After Maintenance sanded the Platen Message-ID: Started Clean again, Clean cycle uses low frequency. Setpoint for power is 150 watts actual is 109 watts reflective power is 73 watts. Changed Tap position from 3 to 4 and then 2, without seeing a change in any of the actual numbers mentioned above. From jperez at snf.stanford.edu Fri Jun 29 13:02:39 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 29 Jun 2007 13:02:39 -0700 Subject: Problem sts SNF 2007-06-29 11:14:48: After Maintenance sanded the Platen Message-ID: RF cable wasn't attached. From jperez at snf.stanford.edu Fri Jun 29 13:13:50 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 29 Jun 2007 13:13:50 -0700 Subject: Shutdown sts SNF 2007-06-28 13:59:20: shut down for work on platen Message-ID: System is in the clean cycle, once completed please Test the sytem. I will leave wafers in a box for testing. If uniformity is less than 10% OK to use. Recipes to use for testing are: std_1kni or std_lfox or std_hfox.