Shutdown sts SNF 2007-06-26 21:14:39: sts lid won't close

dkozak at snf.stanford.edu dkozak at snf.stanford.edu
Tue Jun 26 21:14:40 PDT 2007


sts lid won't close after venting.  After twice loading and unloading wafers, lid got stuck open.  Message on screen: "please close chamber lid".  Pushing blue buttons doesn't work.  Program is not responsive to anything.  Pushed button "plant off" to turn off heater.  




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