Shutdown sts SNF 2007-06-28 13:59:20: shut down for work on platen

jperez at jperez at
Fri Jun 29 13:13:50 PDT 2007

System is in the clean cycle, once completed please Test
the sytem. I will leave wafers in a box for testing. If uniformity
is less than 10% OK to use. Recipes to use for testing are:
std_1kni or std_lfox or std_hfox.

More information about the sts-pcs mailing list