Shutdown sts SNF 2007-06-28 13:59:20: shut down for work on platen

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Jun 29 13:13:50 PDT 2007


System is in the clean cycle, once completed please Test
the sytem. I will leave wafers in a box for testing. If uniformity
is less than 10% OK to use. Recipes to use for testing are:
std_1kni or std_lfox or std_hfox.




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