From jperez at snf.stanford.edu Thu Mar 1 10:10:58 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 1 Mar 2007 10:10:58 -0800 Subject: Problem sts SNF 2007-02-28 19:23:01: Nitride recipes generate error Message-ID: Nitride receipes OK! Someone turned off the N2 flow and that is why system was giving an error. Our mistake when we asked you to turn off the Argon flow on Tuesday so that you could continue using the system until Jim H. had a chance to work on it. Please no NOT turn any of the valves (flows) off at any time. Thanks From jperez at snf.stanford.edu Thu Mar 1 10:11:20 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 1 Mar 2007 10:11:20 -0800 Subject: Comment sts SNF 2007-02-27 17:25:25: system clean Message-ID: completed From rcordova at snf.stanford.edu Thu Mar 1 13:36:57 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Thu, 1 Mar 2007 13:36:57 -0800 Subject: Comment sts SNF 2007-03-01 13:36:56: Please note: System is very near clean cycle Message-ID: System is at 4.4 deposition, very near the clean cycle. From jperez at snf.stanford.edu Fri Mar 2 07:04:24 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 2 Mar 2007 07:04:24 -0800 Subject: Comment sts SNF 2007-03-01 13:36:56: Please note: System is very near clean cycle Message-ID: From kdegreve at snf.stanford.edu Tue Mar 6 18:25:17 2007 From: kdegreve at snf.stanford.edu (kdegreve at snf.stanford.edu) Date: Tue, 6 Mar 2007 18:25:17 -0800 Subject: Problem sts SNF 2007-03-06 18:25:15: system could not vent?? Message-ID: I tried 4 times to vent the chamber (F3-enter-F1-enter); each time I could never hear the valve open, but the 'venting chamber - please wait' message did appear; waiting for 15 minutes didn't give any visible gap between the lid and the gap - pushing the blue buttons obviously didn't open the chamber. Maybe rebooting the system might help; however, being a new user, I didn't feel that sure to do so. I interrupted the last venting cycle and left the system with the Ar gas flow switched ON again. From jperez at snf.stanford.edu Wed Mar 7 08:22:55 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 7 Mar 2007 08:22:55 -0800 Subject: Problem sts SNF 2007-03-06 18:25:15: system could not vent?? Message-ID: I am not sure if a interlock was tripped. I did have an error after final clean "SYSTEM ERROR" MODULE SERIAL COMMUNICATION FAULT. F1 was the only option, which is shutdown. OK now! From mdickey at snf.stanford.edu Thu Mar 8 09:20:52 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 8 Mar 2007 09:20:52 -0800 Subject: Problem sts SNF 2007-02-27 15:32:23: Ran a total of five test this month and dep. rate is still dropping Message-ID: logged From mislam at snf.stanford.edu Tue Mar 20 16:13:46 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 20 Mar 2007 16:13:46 -0700 Subject: Problem sts SNF 2007-03-20 16:13:46: Silane 2% tolerance error Message-ID: Could not run hf oxide From seoung at snf.stanford.edu Tue Mar 20 21:59:14 2007 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Tue, 20 Mar 2007 21:59:14 -0700 Subject: Problem sts SNF 2007-03-20 21:59:13: Gas flow error Message-ID: No silane gas flow at all. 0sccm From mdickey at snf.stanford.edu Wed Mar 21 06:30:48 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 21 Mar 2007 06:30:48 -0700 Subject: Problem sts SNF 2007-03-20 21:59:13: Gas flow error Message-ID: Regulator needed adjustment...... From mdickey at snf.stanford.edu Wed Mar 21 06:31:02 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 21 Mar 2007 06:31:02 -0700 Subject: Problem sts SNF 2007-03-20 16:13:46: Silane 2% tolerance error Message-ID: Regulator adjusted From jperez at snf.stanford.edu Fri Mar 23 14:37:44 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 23 Mar 2007 14:37:44 -0700 Subject: Problem sts SNF 2007-03-23 14:37:43: ETCHBACK3 doesn't seem to be cleaning well Message-ID: This recipe uses the low frequency, which has a high reflective number. Jim Haydon is looking into the problem. When etchback3 is completed, please make sure the platen doesn't show any wafer imprints and has a burnt brown color across the platen. And View port window is clear. If NOT do another ETCHBAK3, until the problem has been resolved. From jperez at snf.stanford.edu Fri Mar 23 14:40:26 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 23 Mar 2007 14:40:26 -0700 Subject: Problem sts SNF 2007-03-23 14:40:26: Dep rate is low for Nitride 60 A/min Message-ID: High Freguency oxide dep. rate is 275A/min From dgunning at snf.stanford.edu Sun Mar 25 13:57:10 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Sun, 25 Mar 2007 13:57:10 -0700 Subject: Problem sts SNF 2007-03-25 13:57:09: plasma striking Message-ID: during npredep recipe at end of clean cycle I noticed that the plasma was striking very inconsistently on the low forward power cycle. Sometimes didn't strike at all and other times flickered. Practically never stayed on for full 5seconds. Maybe this will affect stress and dep rate? From dgunning at snf.stanford.edu Sun Mar 25 14:07:16 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Sun, 25 Mar 2007 14:07:16 -0700 Subject: Problem sts SNF 2007-03-25 14:07:16: plasma striking correction Message-ID: ..i meant the problem is with high freq not low....sorry! From jperez at snf.stanford.edu Wed Mar 28 11:29:34 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 28 Mar 2007 11:29:34 -0700 Subject: Shutdown sts SNF 2007-03-28 11:29:33: Jim Haydon is sending Silane MFC out for Calibration Message-ID: Hope to be back up Friday, possible Monday. From jperez at snf.stanford.edu Thu Mar 29 16:59:44 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Mar 2007 16:59:44 -0700 Subject: Shutdown sts SNF 2007-03-28 11:29:33: Jim Haydon is sending Silane MFC out for Calibration Message-ID: Replace old 2% siland MFC with new 2% silane MFC. NO improvement on Nitride recipes. Do NOT run nitride. OK to process High Frequency Oxides. From jperez at snf.stanford.edu Thu Mar 29 17:01:32 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Mar 2007 17:01:32 -0700 Subject: Comment sts SNF 2007-03-29 17:01:32: High Freqency Oxide dep rate today is 273A/min Message-ID: delta was 26A on a four inch wafer.