Problem sts SNF 2007-03-20 21:59:13: Gas flow error
seoung at snf.stanford.edu
seoung at snf.stanford.edu
Tue Mar 20 21:59:14 PDT 2007
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Problem sts SNF 2007-03-20 16:13:46: Silane 2% tolerance error
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Problem sts SNF 2007-03-20 21:59:13: Gas flow error
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No silane gas flow at all. 0sccm
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Problem sts SNF 2007-03-20 16:13:46: Silane 2% tolerance error
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Problem sts SNF 2007-03-20 21:59:13: Gas flow error
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