Shutdown sts SNF 2007-03-28 11:29:33: Jim Haydon is sending Silane MFC out for Calibration

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Mar 29 16:59:44 PDT 2007


Replace old 2% siland MFC with new 2% silane MFC.
NO improvement on Nitride recipes. Do NOT run nitride.
OK to process High Frequency Oxides.




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