March 2007 Archives by author

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Starting: Thu Mar 1 10:10:58 PST 2007
Ending: Thu Mar 29 17:01:32 PDT 2007
Messages: 18

• Problem sts SNF 2007-03-25 13:57:09: plasma striking   dgunning at snf.stanford.edu
• Problem sts SNF 2007-03-25 14:07:16: plasma striking correction   dgunning at snf.stanford.edu
• Problem sts SNF 2007-02-28 19:23:01: Nitride recipes generate error   jperez at snf.stanford.edu
• Comment sts SNF 2007-02-27 17:25:25: system clean   jperez at snf.stanford.edu
• Comment sts SNF 2007-03-01 13:36:56: Please note: System is very near clean cycle   jperez at snf.stanford.edu
• Problem sts SNF 2007-03-06 18:25:15: system could not vent??   jperez at snf.stanford.edu
• Problem sts SNF 2007-03-23 14:37:43: ETCHBACK3 doesn't seem to be cleaning well   jperez at snf.stanford.edu
• Problem sts SNF 2007-03-23 14:40:26: Dep rate is low for Nitride 60 A/min   jperez at snf.stanford.edu
• Shutdown sts SNF 2007-03-28 11:29:33: Jim Haydon is sending Silane MFC out for Calibration   jperez at snf.stanford.edu
• Shutdown sts SNF 2007-03-28 11:29:33: Jim Haydon is sending Silane MFC out for Calibration   jperez at snf.stanford.edu
• Comment sts SNF 2007-03-29 17:01:32: High Freqency Oxide dep rate today is 273A/min   jperez at snf.stanford.edu
• Problem sts SNF 2007-03-06 18:25:15: system could not vent??   kdegreve at snf.stanford.edu
• Problem sts SNF 2007-02-27 15:32:23: Ran a total of five test this month and dep. rate is still dropping   mdickey at snf.stanford.edu
• Problem sts SNF 2007-03-20 21:59:13: Gas flow error   mdickey at snf.stanford.edu
• Problem sts SNF 2007-03-20 16:13:46: Silane 2% tolerance error   mdickey at snf.stanford.edu
• Problem sts SNF 2007-03-20 16:13:46: Silane 2% tolerance error   mislam at snf.stanford.edu
• Comment sts SNF 2007-03-01 13:36:56: Please note: System is very near clean cycle   rcordova at snf.stanford.edu
• Problem sts SNF 2007-03-20 21:59:13: Gas flow error   seoung at snf.stanford.edu

Last message date: Thu Mar 29 17:01:32 PDT 2007
Archived on: Fri Jan 11 13:10:25 PST 2013

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