From jperez at snf.stanford.edu Fri May 4 08:39:37 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 4 May 2007 08:39:37 -0700 Subject: Comment sts SNF 2007-04-30 14:05:50: clean cycle Message-ID: Completed! From jhaydon at snf.stanford.edu Tue May 8 08:45:36 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 8 May 2007 08:45:36 -0700 Subject: Comment sts SNF 2007-05-08 08:45:36: low frequency uniformity and dep rate Message-ID: I hope to get back on this problem this week From dwlee at snf.stanford.edu Tue May 8 15:20:41 2007 From: dwlee at snf.stanford.edu (dwlee at snf.stanford.edu) Date: Tue, 8 May 2007 15:20:41 -0700 Subject: Shutdown sts SNF 2007-05-08 15:20:40: RF tolerance error Message-ID: Red light at low frequency power generator, Max. PA.V From jperez at snf.stanford.edu Wed May 9 10:04:38 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 9 May 2007 10:04:38 -0700 Subject: Problem sts SNF 2007-05-09 10:04:37: Tried rebooting system, didn't help Message-ID: The low RF red light still is on for MAX P.A.V From jhaydon at snf.stanford.edu Fri May 11 09:04:35 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 May 2007 09:04:35 -0700 Subject: Comment sts SNF 2007-05-11 09:04:35: The sts will probably be down for several days I am wiating for information on a replacement power supply Message-ID: From ericp at snf.stanford.edu Thu May 24 00:21:17 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 24 May 2007 00:21:17 -0700 Subject: Comment sts SNF 2007-05-24 00:21:16: Both PS working Message-ID: Both low and high freq supplies seem to be working fine. I ran the etchback/clean cycles, which exercises both supplies, and there were no fatal errors. I got two power tolerance warnings in the etchback (low F) steps, but these are not uncommon. (I didn't check what the tolerances are set to). From jperez at snf.stanford.edu Fri May 25 13:58:49 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 May 2007 13:58:49 -0700 Subject: Comment sts SNF 2007-05-24 00:21:16: Both PS working Message-ID: Ran five recipes without an error or fault. From jperez at snf.stanford.edu Fri May 25 13:59:18 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 May 2007 13:59:18 -0700 Subject: Comment sts SNF 2007-05-11 09:04:35: The sts will probably be down for several days I am wiating for information on a replacement power supply Message-ID: Ran five recipes without an error or fault. From jperez at snf.stanford.edu Fri May 25 14:00:12 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 May 2007 14:00:12 -0700 Subject: Problem sts SNF 2007-05-09 10:04:37: Tried rebooting system, didn't help Message-ID: Jim H has repaired the old low frequency, and ran five recipes without an error or fault. From jperez at snf.stanford.edu Fri May 25 14:00:38 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 May 2007 14:00:38 -0700 Subject: Shutdown sts SNF 2007-05-08 15:20:40: RF tolerance error Message-ID: Low Frequency has been repaired From jperez at snf.stanford.edu Fri May 25 14:05:27 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 May 2007 14:05:27 -0700 Subject: Comment sts SNF 2007-05-08 08:45:36: low frequency uniformity and dep rate Message-ID: After repairs to Low Frequency the Uniformity for nitride was good. Dep rate ~68 angstrom per minute. From jperez at snf.stanford.edu Fri May 25 14:07:44 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 May 2007 14:07:44 -0700 Subject: Comment sts SNF 2007-04-20 11:00:43: Low Frequency still has low dep. rate and poor uniformity Message-ID: Low Frequency oxide stll has a uniformity problem. I will run more test next week. Only nitride and high frequency oxide is OK to run. From jperez at snf.stanford.edu Fri May 25 14:09:10 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 May 2007 14:09:10 -0700 Subject: Problem sts SNF 2007-04-13 15:06:30: Low Frequency oxide range across the wfr is 10% Message-ID: Low Frequency oxide still has a problem. I'll run more test next week. From jperez at snf.stanford.edu Fri May 25 14:10:21 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 25 May 2007 14:10:21 -0700 Subject: Problem sts SNF 2007-05-25 14:10:20: Low Frequency oxide still has a uniformity problem Message-ID: Nitride and high frequency oxide can be ran. From joongsun at snf.stanford.edu Sun May 27 14:43:12 2007 From: joongsun at snf.stanford.edu (joongsun at snf.stanford.edu) Date: Sun, 27 May 2007 14:43:12 -0700 Subject: Problem sts SNF 2007-05-27 14:43:11: Serial Communication Error Message-ID: There is serial communication error on the display. I rebooted computer but then temperature is not recovered (0 deg) after normal reboot. From rohank at snf.stanford.edu Sun May 27 16:50:58 2007 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Sun, 27 May 2007 16:50:58 -0700 Subject: Comment sts SNF 2007-05-27 16:50:58: Communication error Message-ID: The tool is not responding to the commands from the computer. I did not see any explicit error messages, but the machine is not venting (no sound of the valve being opened). I rebooted the computer twice but could not get it to work. From rohank at snf.stanford.edu Mon May 28 18:28:17 2007 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Mon, 28 May 2007 18:28:17 -0700 Subject: Comment sts SNF 2007-05-28 18:28:16: Good process paremeters Message-ID: I used the STS over the weekend and compared the dep/rate/refractive index parameters. All my parameters have returned to previously optimized values that I obtained during DEC'06. For my process, the tool seems to be running pretty good. From jperez at snf.stanford.edu Tue May 29 09:24:46 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 29 May 2007 09:24:46 -0700 Subject: Shutdown sts SNF 2007-05-29 09:24:44: system error Message-ID: Will not reboot or vent system. From jperez at snf.stanford.edu Tue May 29 10:08:25 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 29 May 2007 10:08:25 -0700 Subject: Shutdown sts SNF 2007-05-29 09:24:44: system error Message-ID: Had to turn hardware off / on before system would reboot. Ok to use. From jperez at snf.stanford.edu Tue May 29 10:09:12 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 29 May 2007 10:09:12 -0700 Subject: Comment sts SNF 2007-05-28 18:28:16: Good process paremeters Message-ID: Thanks for the comment, glad to hear that someone else is testing the system. From jperez at snf.stanford.edu Tue May 29 10:10:09 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 29 May 2007 10:10:09 -0700 Subject: Comment sts SNF 2007-05-27 16:50:58: Communication error Message-ID: Turned off hardware for 15 second, turned on and reboot computer. From jperez at snf.stanford.edu Tue May 29 10:10:43 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 29 May 2007 10:10:43 -0700 Subject: Problem sts SNF 2007-05-27 14:43:11: Serial Communication Error Message-ID: Rebooted after hardware was turned off / on.