Comment sts SNF 2007-05-08 08:45:36: low frequency uniformity and dep rate

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri May 25 14:05:27 PDT 2007

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After repairs to Low Frequency the Uniformity for nitride was 
good. Dep rate ~68 angstrom per minute.

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