Comment sts SNF 2007-04-20 11:00:43: Low Frequency still has low dep. rate and poor uniformity

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri May 25 14:07:44 PDT 2007


Low Frequency oxide stll has a uniformity problem. I will run 
more test next week. Only nitride and high frequency oxide is
OK to run.




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