Comment sts SNF 2007-04-20 11:00:43: Low Frequency still has low dep. rate and poor uniformity

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri May 25 14:07:44 PDT 2007

Previous message: Comment sts SNF 2007-05-24 00:21:16: Both PS working
Next message: Problem sts SNF 2007-04-13 15:06:30: Low Frequency oxide range across the wfr is 10%
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Low Frequency oxide stll has a uniformity problem. I will run 
more test next week. Only nitride and high frequency oxide is
OK to run.

Previous message: Comment sts SNF 2007-05-24 00:21:16: Both PS working
Next message: Problem sts SNF 2007-04-13 15:06:30: Low Frequency oxide range across the wfr is 10%
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the sts-pcs mailing list