Comment sts SNF 2007-05-28 18:28:16: Good process paremeters

rohank at snf.stanford.edu rohank at snf.stanford.edu
Mon May 28 18:28:17 PDT 2007


I used the STS over the weekend and compared the dep/rate/refractive index parameters. All my parameters have returned to previously optimized values that I obtained during DEC'06. For my process, the tool seems to be running pretty good. 




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