From gibby at snf.stanford.edu Fri Nov 2 20:33:38 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Fri, 2 Nov 2007 20:33:38 -0700 Subject: Problem sts SNF 2007-11-02 20:33:37: Gas out of tollerance error during Etchback3 Message-ID: Etchback 3 continues to error out during the O2 descum step. This NEEDS to be fixed; I'm tired of wasting time on cleaning this system. From gibby at snf.stanford.edu Sat Nov 3 08:05:17 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sat, 3 Nov 2007 08:05:17 -0700 Subject: Comment sts SNF 2007-11-03 08:05:16: Error is: O2 Descum 1 Gas Flow Error (oxygen) Message-ID: Notice how long the system has been in the clean cycle... From shanewang at snf.stanford.edu Thu Nov 15 11:36:44 2007 From: shanewang at snf.stanford.edu (shanewang at snf.stanford.edu) Date: Thu, 15 Nov 2007 11:36:44 -0800 Subject: Problem sts SNF 2007-11-15 11:36:44: etchbak3 errors during cleaning nad coral name Message-ID: Hi, some errors interrupted etchbak3 during clean. The process has to be manually resumed. Also my name is not shown up beside the tool. From dgunning at snf.stanford.edu Wed Nov 21 09:24:29 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Wed, 21 Nov 2007 09:24:29 -0800 Subject: Problem sts SNF 2007-11-21 09:24:28: recipe disappeared!!! Message-ID: after changing the process time on my recipe 'sernit2u' and saving the change, computer went straight to startup screen C:/sts. tried to check that change had been saved on recipe and discovered that although sernit2u is still on recipe list - the actualy parameters have all disappeared ---- help!!!!!!!! From ehe at snf.stanford.edu Sat Nov 24 18:57:34 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 24 Nov 2007 18:57:34 -0800 Subject: Comment sts SNF 2007-11-24 18:57:34: cleaning Message-ID: if you get a tolerance error while etchbak is running hit "resume" and it will go away