Problem sts SNF 2007-11-02 20:33:37: Gas out of tollerance error during Etchback3

gibby at snf.stanford.edu gibby at snf.stanford.edu
Fri Nov 2 20:33:38 PDT 2007

Next message: Comment sts SNF 2007-11-03 08:05:16: Error is: O2 Descum 1 Gas Flow Error (oxygen)
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Etchback 3 continues to error out during the O2 descum step.  This NEEDS to be fixed; I'm tired of wasting time on cleaning this system.

Next message: Comment sts SNF 2007-11-03 08:05:16: Error is: O2 Descum 1 Gas Flow Error (oxygen)
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