Problem sts SNF 2007-11-15 11:36:44: etchbak3 errors during cleaning nad coral name

shanewang at snf.stanford.edu shanewang at snf.stanford.edu
Thu Nov 15 11:36:44 PST 2007

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Hi, some errors interrupted etchbak3 during clean. The process has to be manually resumed. 
Also my name is not shown up beside the tool.

Previous message: Comment sts SNF 2007-11-03 08:05:16: Error is: O2 Descum 1 Gas Flow Error (oxygen)
Next message: Problem sts SNF 2007-11-21 09:24:28: recipe disappeared!!!
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