From dgunning at snf.stanford.edu Tue Oct 9 17:17:48 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Tue, 9 Oct 2007 17:17:48 -0700 Subject: Problem sts SNF 2007-10-09 17:17:48: o2 gas flow error Message-ID: during etchback3 o2 descum 2, persistant o2 gas flow error. eventually had to abort cycle. o2 flow and chamber pressure were very unstable. From ericp at snf.stanford.edu Wed Oct 10 18:03:01 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Wed, 10 Oct 2007 18:03:01 -0700 Subject: Comment sts SNF 2007-10-10 18:03:01: RF-gasflow interference Message-ID: I checked it- I was able to ramp the power up slowly, starting from 100W, and snuck all the way up to 145W, when the O2 gas flow started to go nuts. In other words, turning it up slowly allows it to go slightly higher, but there's still an underlying problem with interference. From jperez at snf.stanford.edu Thu Oct 11 14:23:25 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Oct 2007 14:23:25 -0700 Subject: Comment sts SNF 2007-10-10 18:03:01: RF-gasflow interference Message-ID: Ran etchback3 O2 step today and all parameters stable. Ran for 15 minutes. From jperez at snf.stanford.edu Thu Oct 11 14:32:12 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Oct 2007 14:32:12 -0700 Subject: Problem sts SNF 2007-10-09 17:17:48: o2 gas flow error Message-ID: Jim Haydon worked on the ground wires and cleaned contacts. At this time not sure that is twhat took care of the problem (running without errors) or it's an intermittence problem. The etch back recipe is running From jhaydon at snf.stanford.edu Thu Oct 11 16:28:38 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 11 Oct 2007 16:28:38 -0700 Subject: Comment sts SNF 2007-10-11 16:28:37: clean needs to be finished starting with first IPA wipe check log Message-ID: From jperez at snf.stanford.edu Thu Oct 18 07:13:57 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 18 Oct 2007 07:13:57 -0700 Subject: Comment sts SNF 2007-10-11 16:28:37: clean needs to be finished starting with first IPA wipe check log Message-ID: Was completed. From jperez at snf.stanford.edu Thu Oct 18 07:14:37 2007 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 18 Oct 2007 07:14:37 -0700 Subject: Comment sts SNF 2007-09-26 09:15:34: system is at 4.01 thickness. Message-ID: completed and cleaned. From jhaydon at snf.stanford.edu Thu Oct 25 15:36:28 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 25 Oct 2007 15:36:28 -0700 Subject: Problem sts SNF 2007-10-25 15:36:27: new 2% silane bottle installed Message-ID: It has not been tested for thickenss or index of refraction. If some can do it please record your measurements in the log. From rcordova at snf.stanford.edu Fri Oct 26 10:10:45 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Fri, 26 Oct 2007 10:10:45 -0700 Subject: Comment sts SNF 2007-10-26 10:10:45: Tested oxide after silane bottle change Message-ID: Recipe Koso3000 expected: 3,000a Test run: 3,200a Oxide recipe running fine From chen0622 at snf.stanford.edu Mon Oct 29 09:44:02 2007 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Mon, 29 Oct 2007 09:44:02 -0700 Subject: Shutdown sts SNF 2007-10-29 09:44:01: pressure tolence error, could not pump down the chamber Message-ID: The previous user did not open the Argon purge line for pump in standby status. From jhaydon at snf.stanford.edu Mon Oct 29 15:32:49 2007 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 29 Oct 2007 15:32:49 -0700 Subject: Shutdown sts SNF 2007-10-29 09:44:01: pressure tolence error, could not pump down the chamber Message-ID: replaced N2 valve From gibby at snf.stanford.edu Tue Oct 30 12:01:44 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Tue, 30 Oct 2007 12:01:44 -0700 Subject: Problem sts SNF 2007-10-30 12:01:43: Etchback 3 errored out Message-ID: Etchback 3 is consistantly erroring out; this time with a platten error. This is causing some serious delays in user's processing because the etchback cannot be run without baby-sitting the system.