October 2007 Archives by author

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Starting: Tue Oct 9 17:17:48 PDT 2007
Ending: Tue Oct 30 12:01:44 PDT 2007
Messages: 12

• Shutdown sts SNF 2007-10-29 09:44:01: pressure tolence error, could not pump down the chamber   chen0622 at snf.stanford.edu
• Problem sts SNF 2007-10-09 17:17:48: o2 gas flow error   dgunning at snf.stanford.edu
• Comment sts SNF 2007-10-10 18:03:01: RF-gasflow interference   ericp at snf.stanford.edu
• Problem sts SNF 2007-10-30 12:01:43: Etchback 3 errored out   gibby at snf.stanford.edu
• Comment sts SNF 2007-10-11 16:28:37: clean needs to be finished starting with first IPA wipe check log   jhaydon at snf.stanford.edu
• Problem sts SNF 2007-10-25 15:36:27: new 2% silane bottle installed   jhaydon at snf.stanford.edu
• Shutdown sts SNF 2007-10-29 09:44:01: pressure tolence error, could not pump down the chamber   jhaydon at snf.stanford.edu
• Comment sts SNF 2007-10-10 18:03:01: RF-gasflow interference   jperez at snf.stanford.edu
• Problem sts SNF 2007-10-09 17:17:48: o2 gas flow error   jperez at snf.stanford.edu
• Comment sts SNF 2007-10-11 16:28:37: clean needs to be finished starting with first IPA wipe check log   jperez at snf.stanford.edu
• Comment sts SNF 2007-09-26 09:15:34: system is at 4.01 thickness.   jperez at snf.stanford.edu
• Comment sts SNF 2007-10-26 10:10:45: Tested oxide after silane bottle change   rcordova at snf.stanford.edu

Last message date: Tue Oct 30 12:01:44 PDT 2007
Archived on: Fri Jan 11 13:10:26 PST 2013

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