Problem sts SNF 2008-08-02 15:57:23: Uniformity issue

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Sat Aug 2 15:57:23 PDT 2008


I ran a test yesterday and the uniformity from wafer to wafer 
was different.  My low reading was 238A and My high reading
was 278A.  I also had to inr`crease my dep time from 0:45 to
 1:05 to deposit 250A.  I gave John shot all the information.




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