Comment sts SNF 2008-08-05 16:24:24: STS new dep rate

pnataraj at snf.stanford.edu pnataraj at snf.stanford.edu
Tue Aug 5 16:24:24 PDT 2008


Turns out that the shower head in tool was loose. Thanks 
Jeannie for fixing it. The dep rate is back where it used to be. 
Uniformity is also pretty good.
Following are the dep results: 
Prg: std_lfox 
Time: 5 min 
Avg thickness: 1967A
Dep rate : 395 A/min
Thickness across the wafer
Top : 1954A
Bottom: 1965A
Center: 1991A
Left : 1918A
Right: 2010A
Prg: std_hfox
Time: 5 min 
Avg thickness: 1824A
Dep rate : 364 A/min
Thickness across the wafer:
Top : 1832A
Bottom: 1820A
Center: 1832A
Left : 1816A
Right: 1820A




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