Comment sts SNF 2008-08-09 16:50:53: Slow Pump Down

emyers at snf.stanford.edu emyers at snf.stanford.edu
Sat Aug 9 16:50:54 PDT 2008


I worked with Rosie at 5pm on Friday regarding not being able to pump to 15 mTorr after loading wafer. System hung up at 22-24 mTorr.  Eventually it hit the target and began the depositioin.  Today I watch another user run the system.  It pump to 4mTorr base very quickly.  I'm not sure it wasn't a sample problem, since other samples Rosie was running did not have the same problem.




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