Problem sts SNF 2008-07-11 12:16:57: Nitride depositions has a problem with

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Aug 14 07:12:47 PDT 2008

Previous message: Comment sts SNF 2008-08-13 14:26:29: Starting clean again!
Next message: Problem sts SNF 2008-05-21 17:24:18: RF power tolerance error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Watched a 10 min. deposition and did NOT see High 
frequency failure. Dep rate was 89 A/ min.

Previous message: Comment sts SNF 2008-08-13 14:26:29: Starting clean again!
Next message: Problem sts SNF 2008-05-21 17:24:18: RF power tolerance error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the sts-pcs mailing list