Problem sts SNF 2008-07-11 12:16:57: Nitride depositions has a problem with

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Aug 14 07:12:47 PDT 2008


Watched a 10 min. deposition and did NOT see High 
frequency failure. Dep rate was 89 A/ min.




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