Comment sts SNF 2008-08-14 10:05:36: Change 2% silane bottle will run a test

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Aug 14 13:31:04 PDT 2008


Ran two test wafers (front and back), the dep rate for both were
389 and 390 angstroms per minute. Uniformity across the
wafers were 3 and w4 %. Refractive index for both were
1.47.  OK to use.




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