Comment sts SNF 2008-08-21 14:59:38: STS wet etch rates

pnataraj at snf.stanford.edu pnataraj at snf.stanford.edu
Thu Aug 21 14:59:39 PDT 2008

Previous message: Comment sts SNF 2008-08-14 10:05:36: Change 2% silane bottle will run a test
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1. HighFrequency Oxide   
 6:1 BOE = 2749A/min  
 20:1 BOE =  817A/min
2. LowFrequency Oxide
 6:1 BOE = 1360A/min  
 20:1 BOE =  197A/min
3. Nitiride Etch rate 
  6:1 BOE= 173A/min

Previous message: Comment sts SNF 2008-08-14 10:05:36: Change 2% silane bottle will run a test
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