August 2008 Archives by thread

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Starting: Fri Aug 1 17:58:30 PDT 2008
Ending: Thu Aug 21 14:59:39 PDT 2008
Messages: 22

• Problem sts SNF 2008-08-01 17:58:30: F1 STANDBY only option!!   rcordova at snf.stanford.edu
  • Problem sts SNF 2008-08-01 17:58:30: F1 STANDBY only option!!   jperez at snf.stanford.edu
• Problem sts SNF 2008-08-02 15:57:23: Uniformity issue   calarrudo at snf.stanford.edu
  • Problem sts SNF 2008-08-02 15:57:23: Uniformity issue   jperez at snf.stanford.edu
• Problem sts SNF 2008-08-04 08:55:52: Details of Mary Calarrudo's runs ....   shott at snf.stanford.edu
  • Problem sts SNF 2008-08-04 08:55:52: Details of Mary Calarrudo's runs ....   jperez at snf.stanford.edu
• Shutdown sts SNF 2008-08-05 10:50:42: Working on shower head   jperez at snf.stanford.edu
  • Shutdown sts SNF 2008-08-05 10:50:42: Working on shower head   jperez at snf.stanford.edu
• Comment sts SNF 2008-08-05 16:24:24: STS new dep rate   pnataraj at snf.stanford.edu
• Problem sts SNF 2008-07-31 12:14:30: Ran 3 oxide tests today using Hi Freq   jperez at snf.stanford.edu
• Problem sts SNF 2008-08-08 16:55:25: System not pumpind down to 15 mtorr   rcordova at snf.stanford.edu
  • Problem sts SNF 2008-08-08 16:55:25: System not pumpind down to 15 mtorr   jperez at snf.stanford.edu
• Comment sts SNF 2008-08-09 16:50:53: Slow Pump Down   emyers at snf.stanford.edu
  • Comment sts SNF 2008-08-09 16:50:53: Slow Pump Down   jperez at snf.stanford.edu
• Comment sts SNF 2008-08-13 14:26:29: Starting clean again!   rcordova at snf.stanford.edu
  • Comment sts SNF 2008-08-13 14:26:29: Starting clean again!   jperez at snf.stanford.edu
• Problem sts SNF 2008-07-11 12:16:57: Nitride depositions has a problem with   jperez at snf.stanford.edu
• Problem sts SNF 2008-05-21 17:24:18: RF power tolerance error   jperez at snf.stanford.edu
• Problem sts SNF 2008-07-10 14:55:42: High freq RF power not striking all the time   jperez at snf.stanford.edu
• Comment sts SNF 2008-08-14 10:05:36: Change 2% silane bottle will run a test   jperez at snf.stanford.edu
  • Comment sts SNF 2008-08-14 10:05:36: Change 2% silane bottle will run a test   jperez at snf.stanford.edu
• Comment sts SNF 2008-08-21 14:59:38: STS wet etch rates   pnataraj at snf.stanford.edu

Last message date: Thu Aug 21 14:59:39 PDT 2008
Archived on: Fri Jan 11 13:10:27 PST 2013

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