From jperez at snf.stanford.edu  Mon Dec  1 11:53:17 2008
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Mon, 1 Dec 2008 11:53:17 -0800
Subject: Comment sts SNF 2008-11-23 18:35:05: Black spot near centre of platen
Message-ID: <mailman.1034.1357938611.25857.sts-pcs@snf.stanford.edu>

I took a look at the platen after many cleans. Once cleaned 
images disappear, but once you start depositing shadows 
come back (wafer images).



From jperez at snf.stanford.edu  Wed Dec 10 07:04:58 2008
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Wed, 10 Dec 2008 07:04:58 -0800
Subject: Comment sts SNF 2008-11-22 08:54:58: Pump off Saturday am ....
Message-ID: <mailman.1035.1357938611.25857.sts-pcs@snf.stanford.edu>

No problems with the pump shutting off since 11/22/08.