From jhaydon at snf.stanford.edu Fri Feb 1 07:37:59 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 1 Feb 2008 07:37:59 -0800 Subject: Problem sts SNF 2008-01-30 18:33:25: RF ERRORS DURING THE CLEANING Message-ID: I thought the recipe had been modifided to 135 watts but It had not been done. It has now been modified now. The wall clean problem is something new I will look at it later. It has not been a problem in the past. From druist at snf.stanford.edu Wed Feb 6 12:04:48 2008 From: druist at snf.stanford.edu (druist at snf.stanford.edu) Date: Wed, 6 Feb 2008 12:04:48 -0800 Subject: Comment sts SNF 2008-02-06 12:04:47: in clean cycle Wed 2/6 Message-ID: cleaning start 12:00 PM, 4.18 um deposited since last clean From druist at snf.stanford.edu Wed Feb 6 16:53:56 2008 From: druist at snf.stanford.edu (druist at snf.stanford.edu) Date: Wed, 6 Feb 2008 16:53:56 -0800 Subject: Comment sts SNF 2008-02-06 16:53:56: 2 rf errors on clean cycle Message-ID: last week there were 15 or so- much better clean done 5PM 2/6 From jperez at snf.stanford.edu Thu Feb 7 08:53:47 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Feb 2008 08:53:47 -0800 Subject: Comment sts SNF 2008-02-06 16:53:56: 2 rf errors on clean cycle Message-ID: We need more information on when and if it was a back to back RF error. User after this clean put system in clean after 4.1um of oxide deposition and NO ETCHBAK3 error. I ran a ETCHBAK1 right after without any errors. Both these recipes were modified in step "Platen Cln 1,2,3" From jperez at snf.stanford.edu Thu Feb 7 08:54:08 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Feb 2008 08:54:08 -0800 Subject: Comment sts SNF 2008-02-06 12:04:47: in clean cycle Wed 2/6 Message-ID: Completed. From jperez at snf.stanford.edu Thu Feb 7 08:55:32 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Feb 2008 08:55:32 -0800 Subject: Comment sts SNF 2008-01-25 19:52:45: tolerance error Message-ID: Recipes has been modified to eliminate this error. From jperez at snf.stanford.edu Thu Feb 7 08:56:37 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Feb 2008 08:56:37 -0800 Subject: Comment sts SNF 2008-01-14 18:06:20: Repeated RF Tolerance Error Message-ID: Recipes have been modified to eliminate this error. From jperez at snf.stanford.edu Thu Feb 7 09:00:20 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Feb 2008 09:00:20 -0800 Subject: Comment sts SNF 2008-01-10 16:55:44: clean cycle RF errors Message-ID: Recipes have been modified to eliminate RF error. From druist at snf.stanford.edu Tue Feb 19 10:15:31 2008 From: druist at snf.stanford.edu (druist at snf.stanford.edu) Date: Tue, 19 Feb 2008 10:15:31 -0800 Subject: Comment sts SNF 2008-02-19 10:15:31: in clean cycle Message-ID: from log, etchback3 completed. continue clean cycle From druist at snf.stanford.edu Fri Feb 22 13:26:27 2008 From: druist at snf.stanford.edu (druist at snf.stanford.edu) Date: Fri, 22 Feb 2008 13:26:27 -0800 Subject: Comment sts SNF 2008-02-22 13:26:26: cleaning Fri 2/22 Message-ID: in clean cycle- should finish 6PM From jperez at snf.stanford.edu Mon Feb 25 11:56:48 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Feb 2008 11:56:48 -0800 Subject: Comment sts SNF 2008-02-19 10:15:31: in clean cycle Message-ID: completed From jperez at snf.stanford.edu Mon Feb 25 11:57:01 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Feb 2008 11:57:01 -0800 Subject: Comment sts SNF 2008-02-22 13:26:26: cleaning Fri 2/22 Message-ID: completed