Comment sts SNF 2008-02-06 12:04:47: in clean cycle Wed 2/6
druist at snf.stanford.edu
druist at snf.stanford.edu
Wed Feb 6 12:04:48 PST 2008
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Problem sts SNF 2008-01-30 18:33:25: RF ERRORS DURING THE CLEANING
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Comment sts SNF 2008-02-06 12:04:47: in clean cycle Wed 2/6
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cleaning start 12:00 PM, 4.18 um deposited since last clean
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Problem sts SNF 2008-01-30 18:33:25: RF ERRORS DURING THE CLEANING
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Comment sts SNF 2008-02-06 12:04:47: in clean cycle Wed 2/6
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