From mtang at snf.stanford.edu Thu Jan 3 09:16:11 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 3 Jan 2008 09:16:11 -0800 Subject: Shutdown sts SNF 2008-01-03 09:16:11: Needs new groundstrap Message-ID: From mtang at snf.stanford.edu Thu Jan 3 09:21:03 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 3 Jan 2008 09:21:03 -0800 Subject: Problem sts SNF 2008-01-03 09:21:02: Process shifts likely Message-ID: During annual PM, it was observed that the grounding path was not clear. The result is that there was a lot of crud found in the electrical path. Jim has cleaned and is repairing everything. He has also replaced the showerhead. `Be aware, all the processes are likely to shift. Furthermore, the parts will require seasoning before process stabilizes and this may take several weeks. Jeannie will be working on establishing the process baseline, but users must requalify their own non-standard processes. From mtang at snf.stanford.edu Fri Jan 4 09:20:50 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 4 Jan 2008 09:20:50 -0800 Subject: Shutdown sts SNF 2008-01-03 09:16:11: Needs new groundstrap Message-ID: Ground strap replaced. Also, new o-ring installed. Now doing leak check. From mtang at snf.stanford.edu Fri Jan 4 09:21:23 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 4 Jan 2008 09:21:23 -0800 Subject: Shutdown sts SNF 2008-01-04 09:21:22: Leak check and process qual. Message-ID: Leak check underway for new o-ring. Also, process needs to be checked. From jhaydon at snf.stanford.edu Fri Jan 4 16:38:10 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 4 Jan 2008 16:38:10 -0800 Subject: Shutdown sts SNF 2008-01-04 09:21:22: Leak check and process qual. Message-ID: needs qual From jperez at snf.stanford.edu Mon Jan 7 13:45:31 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jan 2008 13:45:31 -0800 Subject: Comment sts SNF 2007-12-10 14:03:13: Process Qual Not Done Message-ID: Requalifing after new shower head installed and Platen aligned to correct thermometer position. From jperez at snf.stanford.edu Mon Jan 7 15:55:19 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jan 2008 15:55:19 -0800 Subject: Problem sts SNF 2008-01-03 09:21:02: Process shifts likely Message-ID: See test data in log book for low Frequency, High Frequency and Nitride. All three deposition rates have increased. 390 A / min. HF oxide, 1.46 380 A / min. LF oxide , 1.47 126 A / min. nitride, 1.97 I'll run more tests to see if data shifts. If you have concerns you should run your own tests. From jperez at snf.stanford.edu Mon Jan 7 15:55:52 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jan 2008 15:55:52 -0800 Subject: Problem sts SNF 2007-12-11 23:59:52: Out of log sheets Message-ID: Refilled log book with log sheets. From jperez at snf.stanford.edu Mon Jan 7 15:56:29 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jan 2008 15:56:29 -0800 Subject: Problem sts SNF 2007-11-15 11:36:44: etchbak3 errors during cleaning nad coral name Message-ID: No error on last etchback ran. From jperez at snf.stanford.edu Mon Jan 7 15:56:54 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Jan 2008 15:56:54 -0800 Subject: Problem sts SNF 2007-10-30 12:01:43: Etchback 3 errored out Message-ID: No errors on last etchback3 ran. From jhaydon at snf.stanford.edu Tue Jan 8 08:25:18 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 8 Jan 2008 08:25:18 -0800 Subject: Problem sts SNF 2007-11-02 20:33:37: Gas out of tollerance error during Etchback3 Message-ID: installed ground strap should fix problem From rissman at snf.stanford.edu Tue Jan 8 09:14:02 2008 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 8 Jan 2008 09:14:02 -0800 Subject: Problem sts SNF 2007-11-21 09:24:28: recipe disappeared!!! Message-ID: See Jeannie if you have further problems. From rissman at snf.stanford.edu Tue Jan 8 09:14:34 2008 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 8 Jan 2008 09:14:34 -0800 Subject: Comment sts SNF 2007-11-03 08:05:16: Error is: O2 Descum 1 Gas Flow Error (oxygen) Message-ID: Jim thinks that is fixed with the new ground strap. From jperez at snf.stanford.edu Thu Jan 10 10:15:34 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 10 Jan 2008 10:15:34 -0800 Subject: Comment sts SNF 2008-01-10 10:15:33: In clean cycle, step 1 Message-ID: From tdo at snf.stanford.edu Thu Jan 10 16:55:45 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Thu, 10 Jan 2008 16:55:45 -0800 Subject: Comment sts SNF 2008-01-10 16:55:44: clean cycle RF errors Message-ID: Clean cycle etchback3 was halted twice because of RF 2 tolerance errors. From xhlim at snf.stanford.edu Mon Jan 14 18:06:20 2008 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Mon, 14 Jan 2008 18:06:20 -0800 Subject: Comment sts SNF 2008-01-14 18:06:20: Repeated RF Tolerance Error Message-ID: Repeated RF tolerance error during clean cycle. It occured about 5 times during the cycle, which makes it hard to leave system in clean cycle without constant babysitting it. From rissman at snf.stanford.edu Tue Jan 15 09:17:29 2008 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 15 Jan 2008 09:17:29 -0800 Subject: Problem sts SNF 2008-01-15 09:17:28: rf tolerance problem reported Message-ID: User has reported rf tolerance problem during clean cycle. From tdo at snf.stanford.edu Wed Jan 16 00:48:30 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Wed, 16 Jan 2008 00:48:30 -0800 Subject: Comment sts SNF 2008-01-16 00:48:30: sts ready for clean Message-ID: sts is ready for clean cycle again if maintenance wants to hunt to etchback3 errors From shanewang at snf.stanford.edu Mon Jan 21 14:51:41 2008 From: shanewang at snf.stanford.edu (shanewang at snf.stanford.edu) Date: Mon, 21 Jan 2008 14:51:41 -0800 Subject: Problem sts SNF 2008-01-21 14:51:40: STS-PECVD Message-ID: Error appears as No Silane 2% flow rate. Processed one batch, 2nd batch aborted for no gas flow. Start cleaning From shanewang at snf.stanford.edu Mon Jan 21 19:17:19 2008 From: shanewang at snf.stanford.edu (shanewang at snf.stanford.edu) Date: Mon, 21 Jan 2008 19:17:19 -0800 Subject: Problem sts SNF 2008-01-21 19:17:18: error --- No silane gas Message-ID: The error of no silane gas happened during oxpredep cleaning cycle. The cleaning cannot be finished. Put the tool in standby mode. From jperez at snf.stanford.edu Tue Jan 22 10:05:31 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 22 Jan 2008 10:05:31 -0800 Subject: Problem sts SNF 2008-01-21 19:17:18: error --- No silane gas Message-ID: This error was due to the gases that shutdown yesterday. Is now running OXPREDEP. From jperez at snf.stanford.edu Tue Jan 22 10:06:26 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 22 Jan 2008 10:06:26 -0800 Subject: Problem sts SNF 2008-01-21 14:51:40: STS-PECVD Message-ID: System is now back up with 2% silane From jperez at snf.stanford.edu Tue Jan 22 10:07:28 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 22 Jan 2008 10:07:28 -0800 Subject: Comment sts SNF 2008-01-16 00:48:30: sts ready for clean Message-ID: this clean cycle was completed 1/16. We are now finishing up on another clean cycle From gibby at snf.stanford.edu Wed Jan 23 15:27:22 2008 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Wed, 23 Jan 2008 15:27:22 -0800 Subject: Problem sts SNF 2008-01-23 15:27:22: RF2 Tolerance Error, Again.... Message-ID: During the etchback step of the clean cycle, there was a RF2 tolerance error. This is the same problem we've been having for months. From ehe at snf.stanford.edu Fri Jan 25 19:52:46 2008 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 25 Jan 2008 19:52:46 -0800 Subject: Comment sts SNF 2008-01-25 19:52:45: tolerance error Message-ID: The tolerance error is still around. I hit F2-resume to get through the etchback - but I can't be around to babysit during cleaning, so if everyone pitches in and hits "resume" whenever they see that error on the STS we can get through cleaning sooner! From ehe at snf.stanford.edu Sat Jan 26 14:42:22 2008 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 26 Jan 2008 14:42:22 -0800 Subject: Problem sts SNF 2008-01-26 14:42:21: software/gas line problem Message-ID: After two normal runs, would not deposit anymore - after pressing F1 error message "no gas lines to purge" and went back into standby mode instead of going into deposition mode - tried 3 times with same result, even rebooted computer. User after me did not experience problem. From jperez at snf.stanford.edu Tue Jan 29 07:09:09 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 29 Jan 2008 07:09:09 -0800 Subject: Problem sts SNF 2008-01-26 14:42:21: software/gas line problem Message-ID: You did the right thing by rebooting the system. From jperez at snf.stanford.edu Tue Jan 29 07:10:13 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 29 Jan 2008 07:10:13 -0800 Subject: Comment sts SNF 2008-01-10 10:15:33: In clean cycle, step 1 Message-ID: this clean cycle was conpleted. From jhaydon at snf.stanford.edu Wed Jan 30 07:17:05 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 30 Jan 2008 07:17:05 -0800 Subject: Problem sts SNF 2008-01-23 15:27:22: RF2 Tolerance Error, Again.... Message-ID: I have reduced th RF power to 135 watts and increased the time to 11 minutes at thie times seems to work From jhaydon at snf.stanford.edu Wed Jan 30 07:17:52 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 30 Jan 2008 07:17:52 -0800 Subject: Problem sts SNF 2008-01-15 09:17:28: rf tolerance problem reported Message-ID: From shanewang at snf.stanford.edu Wed Jan 30 14:30:02 2008 From: shanewang at snf.stanford.edu (shanewang at snf.stanford.edu) Date: Wed, 30 Jan 2008 14:30:02 -0800 Subject: Problem sts SNF 2008-01-30 14:30:02: STS-RF tolerance error Message-ID: It happend at Platen Clean 1 00:04:30. Resumed for further cleaning From shanewang at snf.stanford.edu Wed Jan 30 18:33:25 2008 From: shanewang at snf.stanford.edu (shanewang at snf.stanford.edu) Date: Wed, 30 Jan 2008 18:33:25 -0800 Subject: Problem sts SNF 2008-01-30 18:33:25: RF ERRORS DURING THE CLEANING Message-ID: 14 errors experienced resumes during the cleaning. From jperez at snf.stanford.edu Thu Jan 31 13:39:40 2008 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 Jan 2008 13:39:40 -0800 Subject: Problem sts SNF 2008-01-30 14:30:02: STS-RF tolerance error Message-ID: I have adjusted etchbak3 recipe. I reduced the power by 10% and add 10% more time during platen cleans 1,2,3,. It worked when I run etchbak1 with these parameters.