Problem sts SNF 2008-01-03 09:21:02: Process shifts likely

jperez at snf.stanford.edu jperez at snf.stanford.edu
Mon Jan 7 15:55:19 PST 2008


See test data in log book for low Frequency, High Frequency 
and Nitride. All three deposition rates have increased.
390 A / min. HF oxide, 1.46
380 A / min. LF oxide , 1.47
126 A / min. nitride, 1.97
I'll run more tests to see if data shifts. If you have concerns
you should run your own tests.




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