Problem sts SNF 2007-10-30 12:01:43: Etchback 3 errored out
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Mon Jan 7 15:56:54 PST 2008
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Problem sts SNF 2007-11-15 11:36:44: etchbak3 errors during cleaning nad coral name
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Problem sts SNF 2007-11-02 20:33:37: Gas out of tollerance error during Etchback3
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No errors on last etchback3 ran.
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Problem sts SNF 2007-11-15 11:36:44: etchbak3 errors during cleaning nad coral name
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Problem sts SNF 2007-11-02 20:33:37: Gas out of tollerance error during Etchback3
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