Problem sts SNF 2008-01-21 14:51:40: STS-PECVD

shanewang at snf.stanford.edu shanewang at snf.stanford.edu
Mon Jan 21 14:51:41 PST 2008

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Error appears as
No Silane 2% flow rate. Processed one batch, 2nd batch aborted for no gas flow.
Start cleaning

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