Problem sts SNF 2008-01-23 15:27:22: RF2 Tolerance Error, Again....

gibby at snf.stanford.edu gibby at snf.stanford.edu
Wed Jan 23 15:27:22 PST 2008


During the etchback step of the clean cycle, there was a RF2 tolerance error.  This is the same problem we've been having for months.




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