Problem sts SNF 2008-01-30 14:30:02: STS-RF tolerance error

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Jan 31 13:39:40 PST 2008


I have adjusted etchbak3 recipe. I reduced the power by 10%
and add 10% more time during platen cleans 1,2,3,.
It worked when I run etchbak1 with these parameters.




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