January 2008 Archives by date

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Starting: Thu Jan 3 09:16:11 PST 2008
Ending: Thu Jan 31 13:39:40 PST 2008
Messages: 33

• Shutdown sts SNF 2008-01-03 09:16:11: Needs new groundstrap   mtang at snf.stanford.edu
• Problem sts SNF 2008-01-03 09:21:02: Process shifts likely   mtang at snf.stanford.edu
• Shutdown sts SNF 2008-01-03 09:16:11: Needs new groundstrap   mtang at snf.stanford.edu
• Shutdown sts SNF 2008-01-04 09:21:22: Leak check and process qual.   mtang at snf.stanford.edu
• Shutdown sts SNF 2008-01-04 09:21:22: Leak check and process qual.   jhaydon at snf.stanford.edu
• Comment sts SNF 2007-12-10 14:03:13: Process Qual Not Done   jperez at snf.stanford.edu
• Problem sts SNF 2008-01-03 09:21:02: Process shifts likely   jperez at snf.stanford.edu
• Problem sts SNF 2007-12-11 23:59:52: Out of log sheets   jperez at snf.stanford.edu
• Problem sts SNF 2007-11-15 11:36:44: etchbak3 errors during cleaning nad coral name   jperez at snf.stanford.edu
• Problem sts SNF 2007-10-30 12:01:43: Etchback 3 errored out   jperez at snf.stanford.edu
• Problem sts SNF 2007-11-02 20:33:37: Gas out of tollerance error during Etchback3   jhaydon at snf.stanford.edu
• Problem sts SNF 2007-11-21 09:24:28: recipe disappeared!!!   rissman at snf.stanford.edu
• Comment sts SNF 2007-11-03 08:05:16: Error is: O2 Descum 1 Gas Flow Error (oxygen)   rissman at snf.stanford.edu
• Comment sts SNF 2008-01-10 10:15:33: In clean cycle, step 1   jperez at snf.stanford.edu
• Comment sts SNF 2008-01-10 16:55:44: clean cycle RF errors   tdo at snf.stanford.edu
• Comment sts SNF 2008-01-14 18:06:20: Repeated RF Tolerance Error   xhlim at snf.stanford.edu
• Problem sts SNF 2008-01-15 09:17:28: rf tolerance problem reported   rissman at snf.stanford.edu
• Comment sts SNF 2008-01-16 00:48:30: sts ready for clean   tdo at snf.stanford.edu
• Problem sts SNF 2008-01-21 14:51:40: STS-PECVD   shanewang at snf.stanford.edu
• Problem sts SNF 2008-01-21 19:17:18: error --- No silane gas   shanewang at snf.stanford.edu
• Problem sts SNF 2008-01-21 19:17:18: error --- No silane gas   jperez at snf.stanford.edu
• Problem sts SNF 2008-01-21 14:51:40: STS-PECVD   jperez at snf.stanford.edu
• Comment sts SNF 2008-01-16 00:48:30: sts ready for clean   jperez at snf.stanford.edu
• Problem sts SNF 2008-01-23 15:27:22: RF2 Tolerance Error, Again....   gibby at snf.stanford.edu
• Comment sts SNF 2008-01-25 19:52:45: tolerance error   ehe at snf.stanford.edu
• Problem sts SNF 2008-01-26 14:42:21: software/gas line problem   ehe at snf.stanford.edu
• Problem sts SNF 2008-01-26 14:42:21: software/gas line problem   jperez at snf.stanford.edu
• Comment sts SNF 2008-01-10 10:15:33: In clean cycle, step 1   jperez at snf.stanford.edu
• Problem sts SNF 2008-01-23 15:27:22: RF2 Tolerance Error, Again....   jhaydon at snf.stanford.edu
• Problem sts SNF 2008-01-15 09:17:28: rf tolerance problem reported   jhaydon at snf.stanford.edu
• Problem sts SNF 2008-01-30 14:30:02: STS-RF tolerance error   shanewang at snf.stanford.edu
• Problem sts SNF 2008-01-30 18:33:25: RF ERRORS DURING THE CLEANING   shanewang at snf.stanford.edu
• Problem sts SNF 2008-01-30 14:30:02: STS-RF tolerance error   jperez at snf.stanford.edu

Last message date: Thu Jan 31 13:39:40 PST 2008
Archived on: Fri Jan 11 13:10:26 PST 2013

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